Tyck till om SwePub Sök
här!
Sökning: onr:"swepub:oai:DiVA.org:kth-11829" >
Design and wafer-le...
Design and wafer-level fabrication of SMA wire microactuators on silicon
-
- Clausi, Donato (författare)
- KU Leuven, Division of Production Engineering, Machine Design and Automation (PMA),Micro and Precision Engineering Research Group
-
- Gradin, Henrik (författare)
- KTH,Mikrosystemteknik
-
- Braun, Stefan (författare)
- KTH,Mikrosystemteknik
-
visa fler...
-
- Peirs, Jan (författare)
- KU Leuven, Division of Production Engineering, Machine Design and Automation (PMA),Micro and Precision Engineering Research Group
-
- Stemme, Göran (författare)
- KTH,Mikrosystemteknik
-
- Reynaerts, Dominiek (författare)
- KU Leuven, Division of Production Engineering, Machine Design and Automation (PMA),Micro and Precision Engineering Research Group
-
- van der Wijngaart, Wouter (författare)
- KTH,Mikrosystemteknik
-
visa färre...
-
(creator_code:org_t)
- IEEE Press, 2010
- 2010
- Engelska.
-
Ingår i: Journal of microelectromechanical systems. - : IEEE Press. - 1057-7157 .- 1941-0158. ; 19:4, s. 982-991
- Relaterad länk:
-
http://ieeexplore.ie...
-
visa fler...
-
https://kth.diva-por... (primary) (Raw object)
-
https://urn.kb.se/re...
-
https://doi.org/10.1...
-
visa färre...
Abstract
Ämnesord
Stäng
- This paper reports on the fabrication of microactuators through wafer-level integration of prestrained shape memory alloy wires to silicon structures. In contrast to previous work, the wires are strained under pure tension, and the cold-state reset is provided by single-crystalline silicon cantilevers. The fabrication is based on standard microelectromechanical systems manufacturing technologies, and it enables an actuation scheme featuring high work densities. A mathematical model is discussed, which provides a useful approximation for practical designs and allows analyzing the actuators performance. Prototypes have been tested, and the influence of constructive variations on the actuator behavior is theoretically and experimentally evaluated. The test results are in close agreement with the calculated values, and they show that the actuators feature displacements that are among the highest reported.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- Actuator
- adhesive bonding
- bias spring
- cantilever
- microelectromechanical systems (MEMS)
- NiTi
- reset mechanism
- shape memory alloy (SMA)
- silicon structure
- SU-8
- TiNi
- wafer-level integration
- Electrical engineering, electronics and photonics
- Elektroteknik, elektronik och fotonik
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
Hitta via bibliotek
Till lärosätets databas