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Robust trimorph bul...
Robust trimorph bulk SMA microactuators for batch manufacturing and integration
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- Braun, Stefan (författare)
- KTH,Mikrosystemteknik
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Grund, Thomas (författare)
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- Ingvarsdóttir, Sveinbjörg (författare)
- KTH,Mikrosystemteknik
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Kohl, Manfred (författare)
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- van der Wijngaart, Wouter (författare)
- KTH,Mikrosystemteknik
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- Stemme, Göran (författare)
- KTH,Mikrosystemteknik
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(creator_code:org_t)
- IEEE conference proceedings, 2007
- 2007
- Engelska.
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Ingår i: The 14th IEEE International conference on Solid-State Sensors, Actuators and Microsystems Conference & EUROSENSORS XXI (IEEE TRANSDUCERS 2007). - : IEEE conference proceedings. - 9781424408412 ; , s. 2191-2194
- Relaterad länk:
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http://ieeexplore.ie...
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https://kth.diva-por... (primary) (Raw object)
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- This paper introduces the concept of batch micrufabrication and electrical contacting of bulk SMA nticroactuators. This concept addresses technical solutions for the main challenges related to using SMA actuators such as the necessary mechanical bias force, the difficult electrical contacting and the high power needed for actuation. We report on initial SMA-dielectric-metal trimorph test structures and their characteristics. The bias force is provided by a dielectric layer and the electrical contacting of the bulk SMA is avoided using indirect electrical heating via an additional metal layer. Three nun long beams can provide several hundreds of mu N and deflect several hundreds of mu m. The actuation power is reduced approx. 2.5 times compared to direct heating schemes.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- SMA
- microactuators
- Electrical engineering, electronics and photonics
- Elektroteknik, elektronik och fotonik
Publikations- och innehållstyp
- ref (ämneskategori)
- kon (ämneskategori)
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