On-chip pump system for high-pressure microfluidic applications

• This paper presents a micropump system with four integrated paraffin actuated pumps: Two mobile phase pumps and two sample injector pumps. The mobile phase pumps are evaluated by their ability to deliver a stable, low-ripple flow to be used in chip-based high performance liquid chromatography. It is shown that the two mobile phase pumps can be driven in combined operation with an induced offset to significantly lower flow fluctuations.

Nyckelord

High Pressure

Paraffin

Phase Change Material

Microelectromechanical Systems

Teknisk fysik med inriktning mot mikrosystemteknik

Engineering Science with specialization in Microsystems Technology

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