| 1. |
- Andersson, Christer M, et al.
(författare)
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A SiC Varactor With Large Effective Tuning Range for Microwave Power Applications
- 2011
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Ingår i: IEEE ELECTRON DEVICE LETTERS. - : IEEE Institute of Electrical and Electronics. - 0741-3106. ; 32:6, s. 788-790
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Tidskriftsartikel (refereegranskat)abstract
- SiC Schottky diode varactors have been fabricated for use in microwave power applications, specifically the dynamic load modulation of power amplifiers. A custom doping profile has been employed to spread the C(V) over a large bias voltage range, thereby increasing the effective tuning range under large voltage swing conditions. The small-signal tuning range is approximately six, and punch through is reached at a bias voltage of -60 V, while the breakdown voltage is on the order of -160 V. An interdigitated layout is utilized together with a self-aligned Schottky anode etch process to improve the Q-factor at 2 GHz, which is 20 at zero bias and approximately 160 at punch through.
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| 2. |
- Bano, Nargis, et al.
(författare)
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Depth-resolved cathodoluminescence study of zinc oxide nanorods catalytically grown on p-type 4H-SiC
- 2010
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Ingår i: Journal of Luminescence. - : Elsevier Science B.V., Amsterdam.. - 0022-2313 .- 1872-7883. ; 130:6, s. 963-968
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Tidskriftsartikel (refereegranskat)abstract
- Optical properties of ZnO nanorods (NRs) grown by vapour-liquid-solid (VLS) technique on 4H-p-SiC substrates were probed by cathodoluminescence (CL) measurements at room temperature and at 5 K complemented with electroluminescence. At room temperature the CL spectra for defect related emission intensity was enhanced with the electron beam penetration depth. We observed a variation in defect related green emission along the nanorod axis. This indicates a relatively poor structural quality near the interface between ZnO NRs and p-SiC substrate. We associate the green emission with oxygen vacancies. Analysis of the low-temperature (5 K) emission spectra in the UV region suggests that the synthesized nanorods contain shallow donors and acceptors.
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| 3. |
- Beyer, Franziska, et al.
(författare)
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Annealing behavior of the EB-centers and M-center in low-energy electron irradiated n-type 4H-SiC
- 2011
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Ingår i: Journal of Applied Physics. - : American Institute of Physics. - 0021-8979 .- 1089-7550. ; 109:10, s. 103703-
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Tidskriftsartikel (refereegranskat)abstract
- After low-energy electron irradiation of epitaxial n-type 4H-SiC with a dose of 5 x 10(16) cm(-2), the bistable M-center, previously reported in high-energy proton implanted 4H-SiC, is detected in the deep level transient spectroscopy (DLTS) spectrum. The annealing behavior of the M-center is confirmed, and an enhanced recombination process is suggested. The annihilation process is coincidental with the evolvement of the bistable EB-centers in the low temperature range of the DLTS spectrum. The annealing energy of the M-center is similar to the generation energy of the EB-centers, thus partial transformation of the M-center to the EB-centers is suggested. The EB-centers completely disappeared after annealing temperatures higher than 700 degrees C without the formation of new defects in the observed DLTS scanning range. The threshold energy for moving Si atom in SiC is higher than the applied irradiation energy, and the annihilation temperatures are relatively low, therefore the M-center, EH1 and EH3, as well as the EB-centers are attributed to defects related to the C atom in SiC, most probably to carbon interstitials and their complexes.
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| 4. |
- Beyer, Franziska, et al.
(författare)
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Bistable defects in low-energy electron irradiated n-type 4H-SiC
- 2010
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Ingår i: PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS. - : John Wiley and Sons, Ltd. - 1862-6254. ; 4:8-9, s. 227-229
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Tidskriftsartikel (refereegranskat)abstract
- Epitaxial n-type 4H-SiC layers were irradiated at room temperature by low-energy electrons. During the annihilation process of the irradiation induced defects EH I and EH3, three new bistable centers, labeled EB centers, were detected in the DLTS spectrum. The reconfigurations of the EB centers (I -andgt; II and II -andgt; I) take place at room temperature with a thermal reconfiguration energy of about 0.95 eV. The threshold energy for moving the Si atom from its site in the SiC crystal structure is higher than the applied irradiation energy; therefore, the EB centers are attributed to carbon related complex defects.
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| 5. |
- Beyer, Franziska, et al.
(författare)
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Capacitance transient study of a bistable deep level in e(-)-irradiated n-type 4H-SiC
- 2012
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Ingår i: Journal of Physics D. - : Institute of Physics. - 0022-3727 .- 1361-6463. ; 45:45
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Tidskriftsartikel (refereegranskat)abstract
- Using capacitance transient techniques, a bistable centre, called FB centre here, was observed in electron irradiated 4H-SiC. In configuration A, the deep level known as EH5 (E-a = E-C - 1.07 eV) is detected in the deep level transient spectroscopy spectrum, whereas for configuration B no obvious deep level is observed in the accessible part of the band gap. Isochronal annealing revealed the transition temperatures to be T-A -andgt; B andgt; 730K and for the opposite process T-B -andgt; A approximate to 710 K. The energy needed to conduct the transformations were determined to be E-A(A -andgt; B) = (2.1 +/- 0.1) eV and E-A(B -andgt; A) = (2.3 +/- 0.1) eV, respectively. The pre-factor indicated an atomic jump process for the opposite transition A -andgt; B and a charge carrier-emission dominated process in the case of B -andgt; A. Minority charge carrier injection enhanced the transformation from configuration B to configuration A by lowering the transition barrier by about 1.4 eV. Since the bistable FB centre is already present after low-energy electron irradiation (200 keV), it is likely related to carbon.
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| 6. |
- Beyer, Franziska, et al.
(författare)
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Deep levels in hetero-epitaxial as-grown 3C-SiC
- 2010
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Ingår i: AIP Conference Proceedings, Vol. 1292. - : AIP. - 9780735408470 ; , s. 63-66
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Konferensbidrag (refereegranskat)abstract
- 3C-SiC grown hetero-epitaxially on 4H- or 6H-SiC using a standard or a chloride-based CVD process were electrically characterized using IV, CV and DLTS. The reverse leakage current of the Au-Schottky diodes was reduced to lower than 10-8 A at -2V by a thermal oxidation step using UV-light illumination at 200oC. The Schottky barrier height of the Ni and Au contacts were determined by IV measurement to be ØB = 0.575 eV and ØB = 0.593 eV, respectively, for a contact diameter of about 150 mm. One dominant DLTS peak was observed in the 3C-epilayers independently of the substrate at about EC0:60 eV which is attributed to W6-level in 3C-SiC. This deep level is thought to be related to an intrinsic defect.
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| 7. |
- Beyer, Franziska, et al.
(författare)
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Deep levels in iron doped n- and p-type 4H-SiC
- 2011
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Ingår i: Journal of Applied Physics. - : American Institute of Physics (AIP). - 0021-8979 .- 1089-7550. ; 110, s. 123701-1-123701-5
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Tidskriftsartikel (refereegranskat)abstract
- Deep levels were detected in Fe-doped n- and p-type 4H-SiC using deep level transient spectroscopy (DLTS). One defect level (EC 0.39 eV) was detected in n-type material. DLTS spectra of p-type 4H-SiC show two dominant peaks (EV + 0.98 eV and EV + 1.46 eV). Secondary ion mass spectrometry measurements confirm the presence of Fe in both n- and p-type 4H-SiC epitaxial layers. The majority capture process for all the three Fe-related peaks is multi-phonon assisted. Similar defect behavior in Si indicates that the observed DLTS peaks are likely related to Fe and Fe-B pairs.
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| 8. |
- Beyer, Franziska, et al.
(författare)
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Deep levels in tungsten doped n-type 3C-SiC
- 2011
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Ingår i: Applied Physics Letters. - : American Institute of Physics. - 0003-6951 .- 1077-3118. ; 98:15, s. 152104-
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Tidskriftsartikel (refereegranskat)abstract
- Tungsten was incorporated in SiC and W related defects were investigated using deep level transient spectroscopy. In agreement with literature, two levels related to W were detected in 4H-SiC, whereas only the deeper level was observed in 6H-SiC. The predicted energy level for W in 3C-SiC was observed (E-C-0.47 eV). Tungsten serves as a common reference level in SiC. The detected intrinsic levels align as well: E1 (E-C-0.57 eV) in 3C-SiC is proposed to have the same origin, likely V-C, as EH6/7 in 4H-SiC and E7 in 6H-SiC, respectively.
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| 9. |
- Beyer, Franziska, et al.
(författare)
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Defects in low-energy electron-irradiated n-type 4H-SiC
- 2010
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Ingår i: Physica Scripta, vol. T141. - : IOP Publishing. ; , s. 014006-
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Konferensbidrag (refereegranskat)abstract
- The bistable M-center, previously observed in high-energy proton-implanted 4H-SiC, was detected in low-energy electron-irradiated 4H-SiC using deep-level transient spectroscopy (DLTS). Irradiation increased the DLTS signals of the intrinsic defects Z(1/2) and EH6/7 and introduced the frequently observed defects EH1 and EH3. After the M-center is annealed out at about 650K without bias and at about 575K with bias applied to the sample during the annealing process, a new bistable defect in the low temperature range of the DLTS spectrum, the EB-center, evolves. Since low-energy irradiation affects mainly the carbon atoms in SiC, the M-center and the newly discovered EB-center are most probably carbon-related intrinsic defects.
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| 10. |
- Beyer, Franziska, et al.
(författare)
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Metastable defects in low-energy electron irradiated n-type 4H-SiC
- 2010
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Ingår i: Materials Science Forum, Vols. 645-648. - : Trans Tech Publications. ; , s. 435-438
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Konferensbidrag (refereegranskat)abstract
- After low-energy electron irradiation of epitaxial n-type 4H-SiC, the DUES peak amplitudes. of the defects Z(1/2) and EH6/7, which were already observed in as-grown layers, increased and the commonly found peaks EH1 and EH3 appeared. The bistable M-center, previously seen in high-energy proton implanted 4H-SiC, was detected. New bistable defects, the EB-centers, evolved after annealing out of the M-center, and EF3. The reconfiguration energies for one of the two EB-centers were determined to be about 0.96 eV for both transitions: from configuration I to II and from configuration II to I. Since low-energy electron irradiation (less than220 keV) affects mainly the carbon atom in SiC, both the M- and EB-centers are likely to be carbon related defects.
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