41. |
- Kumari, Sulakshna, et al.
(författare)
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Integration of GaAs-based VCSEL array on SiN platform with HCG reflectors for WDM applications
- 2015
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. - 9781628414622 ; 9372, s. Art. no. 93720U-
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Konferensbidrag (refereegranskat)abstract
- We present a GaAs-based VCSEL structure, BCB bonded to a Si3N4 waveguide circuit, where one DBR is substituted by a free-standing Si3N4 high-contrast-grating (HCG) reflector realized in the Si3N4 waveguide layer. This design enables solutions for on-chip spectroscopic sensing, and the dense integration of 850-nm WDM data communication transmitters where individual channel wavelengths are set by varying the HCG parameters. RCWA shows that a 300nm-thick Si3N4 HCG with 800nm period and 40% duty cycle reflects strongly (
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42. |
- Kögel, Benjamin, 1979, et al.
(författare)
-
Integrated MEMS-tunable VCSELs for reconfigurable optical interconnects
- 2012
-
Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. - 9780819489197 ; 8276, s. Article Number: 82760Q-
-
Konferensbidrag (refereegranskat)abstract
- A simple and low-cost technology for tunable vertical-cavity surface-emitting lasers (VCSELs) with curved movable micromirror is presented. The micro-electro-mechanical system (MEMS) is integrated with the active optical component (so-called half-VCSEL) by means of surface-micromachining, using a reflown photoresist droplet as sacrificial layer. The technology is demonstrated for electrically pumped, short-wavelength (850nm) tunable VCSEts. Fabricated devices with 10 mu m oxide aperture are singlemode with sidemode suppression >35 dB, tunable over 24 mit with output power up to 0.5 mW, and have a beam divergence angle
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43. |
- Kögel, Benjamin, 1979, et al.
(författare)
-
Integrated MEMS-Tunable VCSELs Using a Self-Aligned Reflow Process
- 2012
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Ingår i: IEEE Journal of Quantum Electronics. - 0018-9197 .- 1558-1713. ; 48:2, s. 144-152
-
Tidskriftsartikel (refereegranskat)abstract
- A simple microelectromechanical systems technology for wafer-scale integration of tunable vertical-cavity surface-emitting lasers (VCSELs) is presented. The key element is a self-aligned reflow process to form photoresist droplets, which serve as sacrificial layer and preform for a curved micromirror. Using a 3-D electromagnetic model, the half-symmetric cavity is optimized for singlemode emission. The technology is demonstrated for electrically pumped, short-wavelength (850 nm) tunable VCSELs, but is transferable to other wavelengths and material systems. Fabricated devices with 10 mu m large current aperture are singlemode and tunable over 24 nm. An improved high-speed design with reduced parasitic capacitance enables direct modulation with 3dB-bandwidths up to 6 GHz and data transmission at 5Gbit/s. Small signal analysis shows that the intrinsic parameters (resonance frequency and damping) are wavelength dependent through the differential gain.
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44. |
- Kögel, Benjamin, 1979, et al.
(författare)
-
Integrated MEMS-tunable VCSELs with high modulation bandwidth
- 2011
-
Ingår i: Electronics Letters. - : Institution of Engineering and Technology (IET). - 1350-911X .- 0013-5194. ; 47:13, s. 764-756
-
Tidskriftsartikel (refereegranskat)abstract
- The modulation bandwidth of micromachined tunable VCSELs is typically limited by the parasitic capacitance associated with the large mesa platform for the movable mirror. Presented is a simple technology for wafer-scale integration of tunable VCSELs with low mesa capacitance and high modulation bandwidth. Small signal measurements show a 3dB bandwidth of up to 6 GHz over a tuning range of 18 nm. Digital modulation is demonstrated with error-free data transmission at 5 Gbit/s and eye diagrams at 10 Gbit/s.
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45. |
- Kögel, Benjamin, 1979, et al.
(författare)
-
Integrated Tunable VCSELs With Simple MEMS Technology
- 2010
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Ingår i: Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International. - 0899-9406. - 9781424456833
-
Konferensbidrag (refereegranskat)abstract
- A simple MEMS technology for wafer-scale fabrication of tunable VCSELs is presented. Reflown photo-resist droplets serve as preform for making curved movable micro-mirrors. First devices show a tuning range of 15 nm with mW-output power.
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46. |
- Kögel, Benjamin, 1979, et al.
(författare)
-
Short-wavelength tunable VCSELs
- 2009
-
Ingår i: European Semiconductor Laser Workshop (ESLW).
-
Konferensbidrag (övrigt vetenskapligt/konstnärligt)
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47. |
- Kögel, Benjamin, 1979, et al.
(författare)
-
Singlemode tunable VCSELs with integrated MEMS technology
- 2011
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Ingår i: European Conference on Laser and Electro-Optics (CLEO/Europe).
-
Konferensbidrag (refereegranskat)abstract
- A simple MEMS technology for wafer-scale integration of short-wavelength tunable VCSELs is presented. Using a 3D model the half-symmetric cavity is optimized for singlemode emission from 10 μm large apertures over 12 nm tuning range.
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48. |
- Larsson, Anders, 1957, et al.
(författare)
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Advances in VCSELs for Communication and Sensing
- 2010
-
Ingår i: 22nd IEEE International Semiconductor Laser Conference Digest. - 0899-9406. - 9781424456826 ; , s. 4-5
-
Konferensbidrag (refereegranskat)abstract
- Recent advances in VCSELs for communication and sensing are reviewed, emphasizing the development of high speed VCSELs for datacom systems and high power single-mode VCSELs for sensing applications requiring high spectral purity and coherence.
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49. |
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50. |
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