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Sökning: WFRF:(Brenning Nils)

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11.
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13.
  • Babu, Swetha Suresh, et al. (författare)
  • Modeling of high power impulse magnetron sputtering discharges with tungsten target
  • 2022
  • Ingår i: Plasma sources science & technology. - : IOP Publishing. - 0963-0252 .- 1361-6595. ; 31:6, s. 065009-
  • Tidskriftsartikel (refereegranskat)abstract
    • The ionization region model (IRM) is applied to model a high power impulse magnetron sputtering discharge with a tungsten target. The IRM gives the temporal variation of the various species and the average electron energy, as well as internal discharge parameters such as the ionization probability and the back-attraction probability of the sputtered species. It is shown that an initial peak in the discharge current is due to argon ions bombarding the cathode target. After the initial peak, the W+ ions become the dominating ions and remain as such to the end of the pulse. We demonstrate how the contribution of the W+ ions to the total discharge current at the target surface increases with increased discharge voltage for peak discharge current densities J (D,peak) in the range 0.33-0.73 A cm(-2). For the sputtered tungsten the ionization probability increases, while the back-attraction probability decreases with increasing discharge voltage. Furthermore, we discuss the findings in terms of the generalized recycling model and compare to experimentally determined deposition rates and find good agreement.
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14.
  • Bohm, Martin, et al. (författare)
  • Dynamic trapping : Neutralization of positive space charge in a collisionless magnetized plasma
  • 1990
  • Ingår i: Physical Review Letters. - 0031-9007. ; 65, s. 859-866
  • Tidskriftsartikel (refereegranskat)abstract
    • It is shown by numerical simulations that in a collisionless plasma electron inertia leads to inefficient neutralization of positive space charge and allows large positive potentials (φ ≫ kTe/e) to be established and maintained on the time scale of ion motion. This is true even if the buildup of positive space charge is so slow that it corresponds to a small fraction of the random electron current of the surrounding plasma. A simple physical model clarifies the physics of the process and provides an analytical expression for the potential.
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  • Bohm, Martin, et al. (författare)
  • Dynamic trapping of electrons in the porcupine ionospheric ion beam experiment
  • 1992
  • Ingår i: Advances in Space Research. - 0273-1177. ; 12, s. 9-14
  • Tidskriftsartikel (refereegranskat)abstract
    • Electrons are needed to maintain quasineutrality in a case where positive ions are injected across the magnetic field into a limited volume in a magnetized plasma. In the absence of collisions, a positive potential builds up and traps the electrons which enter the region along the magnetic field. If the added density of ions exceeds the ambient density, large potential differences along the magnetic field can be maintained this way. The process explains several features of the Porcupine xenon ion beam injection experiment, where strong magnetic-field-aligned electric fields were measured in the vicinity of a xenon ion beam which was injected into the ambient ionosphere from a spinning subpayload. © 1992.
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19.
  • Brenning, Nils, et al. (författare)
  • A bulk plasma model for dc and HiPIMS magnetrons
  • 2008
  • Ingår i: PLASMA SOURCES SCIENCE and TECHNOLOGY. - : IOP Publishing. - 0963-0252 .- 1361-6595. ; 17:4, s. 045009-
  • Tidskriftsartikel (refereegranskat)abstract
    • A plasma discharge model has been developed for the bulk plasma (also called the extended presheath) in sputtering magnetrons. It can be used both for high power impulse magnetron sputtering (HiPIMS) and conventional dc sputtering magnetrons. Demonstration calculations are made for the parameters of the HiPIMS sputtering magnetron at Link "oping University, and also benchmarked against results in the literature on dc magnetrons. New insight is obtained regarding the structure and time development of the currents, the electric fields and the potential profiles. The transverse resistivity eta(perpendicular to) has been identified as having fundamental importance both for the potential profiles and for the motion of ionized target material through the bulk plasma. New findings are that in the HiPIMS mode, as a consequence of a high value of eta(perpendicular to), (1) there can be an electric field reversal that in our case extends 0.01-0.04m from the target, (2) the electric field in the bulk plasma is typically an order of magnitude weaker than in dc magnetrons, (3) in the region of electric field reversal the azimuthal current is diamagnetic in nature, i.e. mainly driven by the electron pressure gradient, and actually somewhat reduced by the electron Hall current which here has a reversed direction and (4) the azimuthal current above the racetrack can, through resistive friction, significantly influence the motion of the ionized fraction of the sputtered material and deflect it sideways, away from the target and towards the walls of the magnetron.
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  • Resultat 11-20 av 138
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