| 81. |
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| 82. |
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| 83. |
- Haglund, Åsa, 1976, et al.
(författare)
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Thin-film UV VCSELs and LEDs by electrochemical etching
- 2022
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - 0277-786X .- 1996-756X. ; PC12022
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Konferensbidrag (refereegranskat)abstract
- We will give an overview of state-of-the-art results and challenges to achieve high-performing III-nitride vertical-cavity surface-emitting lasers (VCSELs), with a particular focus on the requirements to push the emission wavelength into the ultraviolet (UV). Our method to simultaneously achieve high-reflectivity mirrors and good cavity length control by electrochemical etching enabled the world’s first UV-B VCSEL. The use of dielectric mirrors yielded lasers with a very temperature-stable emission wavelength thanks to the negative thermo-optic coefficient of the mirrors. We have used the same etch methodology to also lift-off fully processed LEDs from their growth substrate to improve the light extraction efficiency.
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| 84. |
- Haglund, Åsa, 1976, et al.
(författare)
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UV VCSELs – this is the way
- 2022
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Ingår i: 9th Workshop on Physics and Technology of Semiconductor Lasers.
-
Konferensbidrag (refereegranskat)
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| 85. |
- Hashemi, Seyed Ehsan, 1986, et al.
(författare)
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Air-suspended TiO2-based HCG reflectors for visible spectral range
- 2015
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. ; 9372
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Konferensbidrag (refereegranskat)abstract
- For GaN-based microcavity light emitters, such as vertical-cavity surface-emitting lasers (VCSELs) and resonant cavity light emitting diodes (RCLEDs) in the blue-green wavelength regime, achieving a high reflectivity wide bandwidth feedback mirror is truly challenging. The material properties of the III-nitride alloys are hardly compatible with the conventional distributed Bragg reflectors (DBRs) and the newly proposed high-contrast gratings (HCGs). Alternatively, at least for the top outcoupling mirror, dielectric materials offer more suitable material combinations not only for the DBRs but also for the HCGs. HCGs may offer advantages such as transverse mode and polarization control, a broader reflectivity spectrum than epitaxially grown DBRs, and the possibility to set the resonance wavelength after epitaxial growth by the grating parameters. In this work we have realized an air-suspended TiO2 grating with the help of a SiO2 sacrificial layer. The deposition processes for the dielectric layers were fine-tuned to minimize the residual stress. To achieve an accurate control of the grating duty cycle, a newly developed lift-off process, using hydrogen silesquioxan (HSQ) and sacrificial polymethyl-methacrylate (PMMA) resists, was applied to deposit the hard mask, providing sub-10 nm resolution. The finally obtained TiO2/air HCGs were characterized in a micro-reflectance measurement setup. A peak power reflectivity in excess of 95% was achieved for TM polarization at the center wavelength of 435 nm, with a reflectivity stopband width of about 80 nm (FWHM). The measured HCG reflectance spectra were compared to corresponding simulations obtained from rigorous coupled-wave analysis and very good agreement was found.
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| 86. |
- Hashemi, Seyed Ehsan, 1986, et al.
(författare)
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Analysis of structurally sensitive loss in GaN-based VCSEL cavities and its effect on modal discrimination
- 2014
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Ingår i: Optics Express. - 1094-4087 .- 1094-4087. ; 22:1, s. 411-426
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Tidskriftsartikel (refereegranskat)abstract
- Lateral loss causes optical energy to leave the laser cavity in the transverse, lateral, direction, and is sometimes neglected to simplify the numerical simulations. However, in contrast to outcoupling and absorption losses, we show that the lateral loss can change drastically with only nanometer-sized changes of the cavity structure, from being virtually zero to becoming the major source of cavity loss, since the cavity becomes antiguiding. This can be explained as the opening of a channel of efficient resonant lateral leakage of optical power at a certain oblique propagation angle. A number of different realizations of current apertures and top mirror designs in GaN-based VCSEL cavities, which have been suggested for realization of microcavity lasers emitting in the blue wavelength range, are simulated. Many of these are shown to lead to unintentional antiguiding, which can more than double the threshold gain for lasing. Notably, for strong enough antiguiding the resonant lateral leakage decreases so that the threshold gain values might again be tolerable. This regime has been suggested for robust single-mode operation since earlier predictions, building on analogies with slab waveguides, hinted at a very strong suppression of higher order modes. However, our simulations indicate that for the VCSEL cavities the derived formulas grossly overestimate the modal discrimination.
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| 87. |
- Hashemi, Seyed Ehsan, 1986, et al.
(författare)
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Effect of compositional interlayers on the vertical electrical conductivity of Si-doped AlN/GaN distributed Bragg reflectors grown on SiC''
- 2017
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Ingår i: Applied Physics Express. - 1882-0786 .- 1882-0778. ; 10:5, s. 055501-
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Tidskriftsartikel (refereegranskat)abstract
- We have investigated the effect of strain-compensating interlayers on the vertical electrical conductivity of Si-doped AlN/GaN distributed Bragg reflectors (DBRs). Samples with 10.5 mirror pairs were grown through plasma-assisted molecular beam epitaxy on SiC. Room-temperature current–voltage characteristics were measured vertically in mesas through 8 of the 10.5 pairs. The sample with no interlayers yields a mean specific series resistance of 0.044 Ω cm2 at low current densities, while three samples with 5/5-Å-thick, 2/2-nm-thick, and graded interlayers have resistivities between 0.16 and 0.34 Ω cm2. Thus, interlayers impair vertical current transport, and they must be designed carefully when developing conductive DBRs.
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| 88. |
- Hashemi, Seyed Ehsan, 1986, et al.
(författare)
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Engineering the Lateral Optical Guiding in Gallium Nitride (GaN)-based Vertical-Cavity Surface-Emitting Laser (VCSEL) Cavities to Reach the Lowest Threshold Gain
- 2013
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Ingår i: Japanese Journal of Applied Physics. - 1347-4065 .- 0021-4922. ; 52:8 PART 2, s. 08JG04 -
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Tidskriftsartikel (refereegranskat)abstract
- In order to improve the current injection in GaN-based blue vertical-cavity surface-emitting lasers (VCSELs) a dielectric aperture is generally used in combination with an indium–tin-oxide (ITO) layer on the top intracavity p-contact layer. The most straightforward way to realize this introduces a depression of the structure near the optical axis and we show, by using a two-dimensional (2D) effective index method and a three-dimensional (3D) coupled-cavity beam propagation method, that this typically results in optically anti-guided structures with associated high optical losses and thus very high threshold gains. Remarkably, the threshold gain reduces with increased negative guiding, which is due to improved lateral confinement and reduction of lateral leakage. Still, moderately positively guided designs should be preferred to avoid the detrimental effect of lateral leakage and high diffraction loss. To ensure positive index guiding, we propose to planarize the structure or introduce an elevation near the optical axis by additional processing, with an associated reduction in threshold material gain from 6000 to 2000 cm-1 for the studied structures.
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| 89. |
- Hashemi, Seyed Ehsan, 1986, et al.
(författare)
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Engineering the transverse optical guiding in GaN-based VCSELs to avoid detrimental optical loss
- 2012
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Ingår i: International Workshop on Nitride Semiconductors 2012, October 14-19, 2012, Sapporo, Japan, p. ThP-OD-33.
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)abstract
- In order to improve the current injection in GaN-based blue vertical cavity surface emitting lasers (VCSELs) a dielectric aperture is generally used in combination with an indium-tin-oxide (ITO) layer on the top intracavity p-contact layer. The most straightforward way to realize this introduces a depression of the structure near the optical axis and we show, by using a 2D effective index method and a 3D coupled-cavity beam propagation method, that this typically results in optically anti-guided structures with associated high optical losses and thus very high threshold gains. Remarkably, the threshold gain reduces with increased negative guiding, which is due to improved lateral confinement and reduction of lateral leakage. Still, moderately positively guided designs should be preferred to avoid the detrimental effect of lateral leakage and high diffraction loss. To ensure positive index guiding, we propose to planarize the structure or introduce an elevation near the optical axis by additional processing, with an associated reduction in threshold material gain from 6000 cm-1 to 2000 cm-1 for the studied structures.
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| 90. |
- Hashemi, Seyed Ehsan, 1986, et al.
(författare)
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Thermal lensing effects on lateral leakage in GaN-based vertical-cavity surface-emitting laser cavities
- 2017
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Ingår i: Optics Express. - 1094-4087 .- 1094-4087. ; 25:9, s. 9556-9568
-
Tidskriftsartikel (refereegranskat)abstract
- Lateral leakage of light has been identified as a detrimental loss source in many suggested and experimentally realized GaN-based VCSELs. In the present work we include thermal effects to realistically account for the substantial Joule heating in these devices. In contrast to what could be expected from the previous results, the induced thermal lensing does not make antiguided cavities more positively guided, so that they approach the unguided regime with extremely high lateral leakage. Rather, thermal lensing strongly suppresses lateral leakage for both antiguided and guided cavities. This is explained in terms of lowered launch of power from the central part of the cavity and/or lower total internal reflection in the peripheral part; the former effect is active in all cavities whereas the latter only contributes to the very strongly reduced leakage in weakly antiguided cavities. Thermal lensing suppresses lateral leakage both for the fundamental and the first higher order mode, but a strong modal discrimination is still achieved for the antiguided cavities. Thus, strongly antiguided cavities could be used to achieve single-mode devices, but at the cost of slightly higher threshold gain and stronger temperature dependent performance characteristics.
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