| 1. |
- Barrios, Carlos Angulo, et al.
(författare)
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Demonstration of slot-waveguide structures on silicon nitride / silicon oxide platform
- 2007
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Ingår i: Optics Express. - 1094-4087. ; 15:11, s. 6846-6856
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Tidskriftsartikel (refereegranskat)abstract
- We report on the first demonstration of guiding light in vertical slot-waveguides on silicon nitride/silicon oxide material system. Integrated ring resonators and Fabry-Perot cavities have been fabricated and characterized in order to determine optical features of the slot-waveguides. Group index behavior evidences guiding and confinement in the low-index slot region at O-band (1260-1370nm) telecommunication wavelengths. Propagation losses of < 20 dB/cm have been measured for the transverse-electric mode of the slot-waveguides.
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| 2. |
- Barrios, Carlos Angulo, et al.
(författare)
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Label-free optical biosensing with slot-waveguides
- 2008
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Ingår i: Optics Letters. - 0146-9592 .- 1539-4794. ; 33:7, s. 708-710
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Tidskriftsartikel (refereegranskat)abstract
- We demonstrate label-free molecule detection by using an integrated biosensor based on a Si3N4/SiO2 Slot-waveguide microring resonator. Bovine serum albumin (BSA) and anti-BSA molecular binding events on the sensor surface are monitored through the measurement of resonant wavelength shifts with varying biomolecule concentrations. The biosensor exhibited sensitivities of 1.8 and 3.2 nm/(ng/mm(2)) for the detection of anti-BSA and BSA, respectively. The estimated detection limits are 28 and 16 pg/mm(2) for anti-BSA and BSA, respectively, limited by wavelength resolution.
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| 3. |
- Barrios, C. A., et al.
(författare)
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Reconfiguration of microring resonators by liquid adhesion
- 2008
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Ingår i: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 93:20
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Tidskriftsartikel (refereegranskat)abstract
- We present a procedure to reconfigure microring resonators based on liquid surface adhesion. Droplets of organic solvents were deposited over Si3N4/SiO2 strip- and slot-waveguide ring resonators, and the transmission spectra were measured several hours after the evaporation of the droplets at room temperature. Our measurements show that the optical properties of the microrings are significantly modified by liquid adhered to the waveguides, persisting even 96 h after bulk evaporation. Liquid-solid interfacial forces slow down liquid evaporation at the nanoscale, enabling permanent photonic configurations. Rewriteability is achieved by removing the adhered liquid with heat.
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| 4. |
- Barrios, Carlos Angulo, et al.
(författare)
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Slot-waveguide biochemical sensor
- 2007
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Ingår i: Optics Letters. - 0146-9592 .- 1539-4794. ; 32:21, s. 3080-3082
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Tidskriftsartikel (refereegranskat)abstract
- We report an experimental demonstration of an integrated biochemical sensor based on a slot-waveguidemicroring resonator. The microresonator is fabricated on a Si3N4-SiO2 platform and operates at a wavelength of 1.3 mu m. The transmission spectrum of the sensor is measured with different ambient refractive indices ranging from n = 1. 33 to 1.42. A linear shift of the resonant wavelength with increasing ambient refractive index of 212 nm/refractive index units (RIU) is observed. The sensor detects a minimal refractive index variation of 2 X 10(-4) RIU.
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| 5. |
- Carlborg, Carl Fredrik, et al.
(författare)
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A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips
- 2010
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Ingår i: Lab on a Chip. - : Royal Society of Chemistry (RSC). - 1473-0197 .- 1473-0189. ; 10:3, s. 281-290
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Tidskriftsartikel (refereegranskat)abstract
- We present the design, fabrication, and characterisation of an array of optical slot-waveguide ring resonator sensors, integrated with microfluidic sample handling in a compact cartridge, for multiplexed real-time label-free biosensing. Multiplexing not only enables high throughput, but also provides reference channels for drift compensation and control experiments. Our use of alignment tolerant surface gratings to couple light into the optical chip enables quick replacement of cartridges in the read-out instrument. Furthermore, our novel use of a dual surface-energy adhesive film to bond a hard plastic shell directly to the PDMS microfluidic network allows for fast and leak-tight assembly of compact cartridges with tightly spaced fluidic interconnects. The high sensitivity of the slot-waveguide resonators, combined with on-chip referencing and physical modelling, yields a volume refractive index detection limit of 5 x 10(-6) refractive index units (RIUs) and a surface mass density detection limit of 0.9 pg mm(-2), to our knowledge the best reported values for integrated planar ring resonators.
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| 6. |
- Fischer, Andreas C., et al.
(författare)
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3D printing of silicon micro and nano structures by ion implantation, silicon deposition, and selective silicon etching
- 2013
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Ingår i: Technical Paper - Society of Manufacturing Engineers.
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Konferensbidrag (refereegranskat)abstract
- A method for additive layer-by-layer fabrication of arbitrarily shaped 3D silicon micro and nano structures is reported. The fabrication is based on alternating steps of chemical vapor deposition of silicon and local implantation of gallium ions by focused ion beam (FIB) writing. In a final step, the defined 3D structures are formed by etching the silicon in potassium hydroxide (KOH), in which the local ion implantation provides the etching selectivity. The proposed technology could change and greatly simplify the fabrication of many MEMS, NEMS, and silicon photonic devices without requiring a fully equipped semiconductor cleanroom. This layer-by-layer fabrication method is in principle also viable for the implementation of 3D structures in semiconductors other than silicon.
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| 7. |
- Gylfason, Kristinn Björgvin, 1978-
(författare)
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Integrated Optical Slot-Waveguide Ring Resonator Sensor Arrays for Lab-on-Chip Applications
- 2010
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Doktorsavhandling (övrigt vetenskapligt/konstnärligt)abstract
- This thesis treats the development of an integrated optical sensor array. The sensors are slot-waveguide ring resonators, integrated with on-chip surface grating couplers and light splitters, for alignment tolerant, real-time, refractive index sensing, and label-free biosensing. The work includes: the design of components and system layouts, the development of fabrication methods, the fabrication of sensor chips, the characterization of the chips, and the development of physical system models for accurate extraction of resonance wavelengths in measured spectra. The main scientific achievements include: The evaluation of a novel type of nano-structured optical waveguide for biochemical sensing. The realization of an array of such slot-waveguide sensors, integrated with microfluidic sample handling, for multiplex assays. The first study of the thermal behavior of slot-waveguide sensors and the discovery of unique temperature compensation capabilities. From an application perspective, the use of alignment tolerant surface gratings to couple light into the optical chip enables quick replacement of cartridges in the read-out instrument. Furthermore, the fabrication sequence avoids polishing of individual chips, and thus ensures that the cost benefits of silicon batch micro-fabrication can be leveraged in mass production. The high sensitivity of the slot waveguide resonators, combined with on-chip referencing and physical modeling, yields low limits of detection. The obtained volume refractive index detection limit of 5 × 10−6 refractive index units (RIU), and the surface mass density detection limit of 0.9 pg/mm2, shows that performance comparable to that of commercial non-integrated surface plasmon resonance sensors, made from bulk optical components, canbe achieved in a compact cartridge.
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| 8. |
- Maire, Guillaume, et al.
(författare)
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High efficiency silicon nitride surface grating couplers
- 2008
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Ingår i: Optics Express. - 1094-4087. ; 16:1, s. 328-333
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Tidskriftsartikel (refereegranskat)abstract
- High efficiency surface grating couplers for silicon nitride waveguides have been designed, fabricated, and characterized. Coupling efficiencies exceeding 60 % are reported at a wavelength of 1.31 mu m, as well as angular and wavelength -3 dB tolerances of 4 and 50 nm, respectively. When the wavelength is increased from 1310 nm to 1450 nm the coupling efficiency progressively decreases but remains above 20 % at 1450 nm. The influence of the duty ratio of the grating has also been investigated: maximum coupling efficiency was obtained at 50 % duty ratio.
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| 9. |
- Vivien, L., et al.
(författare)
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Vertical multiple-slot waveguide ring resonators in silicon nitride
- 2008
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Ingår i: Optics Express. - 1094-4087. ; 16:22, s. 17237-17242
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Tidskriftsartikel (refereegranskat)abstract
- This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 mu m, 90 mu m and 110 mu m) have been carried out for TE and TM polarizations at the wavelength of 1.3 mu m. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.
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