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- Modin, A., et al.
(författare)
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Electronic structure of Cu3N films studied by soft x-ray spectroscopy
- 2008
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Ingår i: Journal of Physics. - : IOP Publishing. - 0953-8984 .- 1361-648X. ; 20:23
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Tidskriftsartikel (refereegranskat)abstract
- Soft x- ray emission spectroscopy was used to characterize the electronic structure of seven copper nitride films, one synthesized with atomic layer deposition ( ALD) and six grown with chemical vapor deposition ( CVD) at different preparation temperatures. Interpretation of the x- ray emission spectra was supported by calculations of the electronic structure for bulk pure Cu3N and Cu3N with: an excess of Cu atoms, oxygen or carbon impurities, and N vacancies. The calculations are shown to describe the experimental spectra quite well. Analysis of the x- ray spectra suggests that films grown in copper rich environments and above a cut- off temperature of approximately 360 degrees C have a growing fraction of copper enriched areas, while films prepared below this temperature do not have these areas with excess copper.
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