| 1. |
- Borgentun, Carl, 1979, et al.
(författare)
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Optically pumped high-power semiconductor disk laser with gain element engineered for wide tunability
- 2010
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. - 9780819481931 ; 7720:1, s. 772014-8
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)abstract
- The layer structure of the gain element in an optically pumped semiconductor disk laser (OP-SDL) was designed for wide tunability. This was achieved by a parametric optimization of the structure, which in effect balanced the spectrally varying influence of the gain of the quantum wells, the longitudinal distribution of the standing wave lasing field in the structure, and the degree of resonance in the subcavity formed between the distributed Bragg reflector at the bottom and the air-semiconductor interface at the top. The quality measure in the optimization was the spectral reflectance of the gain element for light incident from the external cavity at low power. This unsaturated reflectance was compared to its target function, which was constant at a specified value larger than unity over a wide, prescribed wavelength range. The fabricated gain element was used in a linear OP-SDL with a rotatable intra-cavity birefringent filter for wavelength tuning. The design principles for achieving wide tunability were experimentally validated by the strong agreement between measurements and simulations of the spectral threshold pump intensity. Furthermore, tuning experiments at high pump powers were performed showing that the lasing wavelength could be tuned from 967 nm to 1010 nm with a maximum output power of 2.6 W.
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| 2. |
- Chang, Tsu-Chi, et al.
(författare)
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GaN-based vertical-cavity surface-emitting laser incorporating a TiO2 high-index-contrast grating
- 2020
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. ; 11280
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Konferensbidrag (refereegranskat)abstract
- We demonstrate the first electrically injected GaN-based VCSEL with a TiO2 high-contrast grating (HCG) as the top mirror. The TiO2-HCG rested directly on the n-GaN without an airgap for mechanical stability. A VCSEL with an aperture diameter of 10 mu m had a threshold current of 25 mA under pulsed operation at room temperature. Multiple longitudinal modes coexist around 400 nm, each TM-polarized with a linewidth of 0.5 nm (spectral resolution limited). This first demonstration of a TiO2-HCG VCSEL offers a new route to achieve polarization pinning and could also allow additional benefits such as post-growth setting of resonance wavelength.
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| 3. |
- Engström, David, 1976, et al.
(författare)
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Steering accuracy of a spatial light modulator-based single beam steerer: guidelines and limitations
- 2008
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Ingår i: SPIE Proceedings. - : SPIE. - 0277-786X .- 1996-756X. - 9780819472588
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Konferensbidrag (refereegranskat)abstract
- The positioning accuracy when a phase-only one dimensional spatial light modulator (SLM) is used for beam steering is limited by the number of pixels and their quantized phase modulation. Optimizing the setting of the SLM pixels individually can lead to the inaccuracy being a significant fraction of the diffraction limited spot size. This anomalous behaviour was simulated numerically, and experiments showed the same phenomena with very good agreement. However, by including an extra degree of freedom in the optimization of the SLM setting, we show that the accuracy can be improved by a factor proportional to the number of pixels in the SLM.
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| 4. |
- Haglund, Erik, 1985, et al.
(författare)
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Multi-wavelength VCSEL arrays using high-contrast gratings
- 2017
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. - 9781510606678 ; 10113
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Konferensbidrag (refereegranskat)abstract
- The use of a high-contrast grating (HCG) as the top mirror in a vertical-cavity surface-emitting laser (VCSEL) allows for setting the resonance wavelength by the grating parameters in a post-epitaxial growth fabrication process. Using this technique, we demonstrate electrically driven multi-wavelength VCSEL arrays at ∼980 nm wavelength. The VCSELs are GaAs-based and the suspended GaAs HCGs were fabricated using electron-beam lithography, dry etching and selective removal of an InGaP sacrificial layer. The air-coupled cavity design enabled 4-channel arrays with 5 nm wavelength spacing and sub-mA threshold currents thanks to the high HCG reflectance.
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| 5. |
- Haglund, Åsa, 1976, et al.
(författare)
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Progress and challenges in electrically pumped GaN-based VCSELs
- 2016
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. ; 9892
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Konferensbidrag (refereegranskat)abstract
- The Vertical-Cavity Surface-Emitting Laser (VCSEL) is an established optical source in short-distance optical communication links, computer mice and tailored infrared power heating systems. Its low power consumption, easy integration into two-dimensional arrays, and low-cost manufacturing also make this type of semiconductor laser suitable for application in areas such as high-resolution printing, medical applications, and general lighting. However, these applications require emission wavelengths in the blue-UV instead of the established infrared regime, which can be achieved by using GaN-based instead of GaAs-based materials. The development of GaN-based VCSELs is challenging, but during recent years several groups have managed to demonstrate electrically pumped GaN-based VCSELs with close to 1 mW of optical output power and threshold current densities between 3-16 kA/cm2. The performance is limited by challenges such as achieving high-reflectivity mirrors, vertical and lateral carrier confinement, efficient lateral current spreading, accurate cavity length control and lateral optical mode confinement. This paper summarizes different strategies to solve these issues in electrically pumped GaN-VCSELs together with state-of-the-art results. We will highlight our work on combined transverse current and optical mode confinement, where we show that many structures used for current confinement result in unintentionally optically anti-guided resonators. Such resonators can have a very high optical loss, which easily doubles the threshold gain for lasing. We will also present an alternative to the use of distributed Bragg reflectors as high-reflectivity mirrors, namely TiO2/air high contrast gratings (HCGs). Fabricated HCGs of this type show a high reflectivity (>95%) over a 25 nm wavelength span.
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| 6. |
- Hashemi, Seyed Ehsan, 1986, et al.
(författare)
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Air-suspended TiO2-based HCG reflectors for visible spectral range
- 2015
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. ; 9372
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Konferensbidrag (refereegranskat)abstract
- For GaN-based microcavity light emitters, such as vertical-cavity surface-emitting lasers (VCSELs) and resonant cavity light emitting diodes (RCLEDs) in the blue-green wavelength regime, achieving a high reflectivity wide bandwidth feedback mirror is truly challenging. The material properties of the III-nitride alloys are hardly compatible with the conventional distributed Bragg reflectors (DBRs) and the newly proposed high-contrast gratings (HCGs). Alternatively, at least for the top outcoupling mirror, dielectric materials offer more suitable material combinations not only for the DBRs but also for the HCGs. HCGs may offer advantages such as transverse mode and polarization control, a broader reflectivity spectrum than epitaxially grown DBRs, and the possibility to set the resonance wavelength after epitaxial growth by the grating parameters. In this work we have realized an air-suspended TiO2 grating with the help of a SiO2 sacrificial layer. The deposition processes for the dielectric layers were fine-tuned to minimize the residual stress. To achieve an accurate control of the grating duty cycle, a newly developed lift-off process, using hydrogen silesquioxan (HSQ) and sacrificial polymethyl-methacrylate (PMMA) resists, was applied to deposit the hard mask, providing sub-10 nm resolution. The finally obtained TiO2/air HCGs were characterized in a micro-reflectance measurement setup. A peak power reflectivity in excess of 95% was achieved for TM polarization at the center wavelength of 435 nm, with a reflectivity stopband width of about 80 nm (FWHM). The measured HCG reflectance spectra were compared to corresponding simulations obtained from rigorous coupled-wave analysis and very good agreement was found.
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| 7. |
- Hashemi, Seyed Ehsan, 1986, et al.
(författare)
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Triggering of guiding and antiguiding effects in GaN-based VCSELs
- 2014
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. ; 9001
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Konferensbidrag (refereegranskat)abstract
- We show numerically that many recently proposed GaN-based VCSEL cavities, with DBR mirrors deposited onto the current aperture, balance dangerously close to the border between the guided and antiguided regime. A guided cavity is often preferred because of its lower optical loss, but a strongly antiguided cavity offers built-in modal discrimination favoring single fundamental mode operation. We show that very small changes in the VCSEL structure are sufficient to strongly change the guiding character of the VCSEL cavity, and that thermal lensing caused by device self-heating under operation can dramatically reduce the optical loss but not the modal discrimination in the antiguided cavities.
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| 8. |
- Kumari, Sulakshna, et al.
(författare)
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Integration of GaAs-based VCSEL array on SiN platform with HCG reflectors for WDM applications
- 2015
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. - 9781628414622 ; 9372, s. Art. no. 93720U-
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Konferensbidrag (refereegranskat)abstract
- We present a GaAs-based VCSEL structure, BCB bonded to a Si3N4 waveguide circuit, where one DBR is substituted by a free-standing Si3N4 high-contrast-grating (HCG) reflector realized in the Si3N4 waveguide layer. This design enables solutions for on-chip spectroscopic sensing, and the dense integration of 850-nm WDM data communication transmitters where individual channel wavelengths are set by varying the HCG parameters. RCWA shows that a 300nm-thick Si3N4 HCG with 800nm period and 40% duty cycle reflects strongly (
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| 9. |
- Kögel, Benjamin, 1979, et al.
(författare)
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Integrated MEMS-tunable VCSELs for reconfigurable optical interconnects
- 2012
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. - 9780819489197 ; 8276, s. Article Number: 82760Q-
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Konferensbidrag (refereegranskat)abstract
- A simple and low-cost technology for tunable vertical-cavity surface-emitting lasers (VCSELs) with curved movable micromirror is presented. The micro-electro-mechanical system (MEMS) is integrated with the active optical component (so-called half-VCSEL) by means of surface-micromachining, using a reflown photoresist droplet as sacrificial layer. The technology is demonstrated for electrically pumped, short-wavelength (850nm) tunable VCSEts. Fabricated devices with 10 mu m oxide aperture are singlemode with sidemode suppression >35 dB, tunable over 24 mit with output power up to 0.5 mW, and have a beam divergence angle
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| 10. |
- Larsson, Anders, 1957, et al.
(författare)
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High-speed tunable and fixed-wavelength VCSELs for short-reach optical links and interconnects
- 2012
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. - 9780819489197 ; 8276, s. Article Number: 82760H-
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Konferensbidrag (refereegranskat)abstract
- This paper presents a review of recent work on high speed tunable and fixed wavelength vertical cavity surface emitting lasers (VCSELs) at Chalmers University of Technology. All VCSELs are GaAs-based, employ an oxide aperture for current and/or optical confinement, and emit around 850 nm. With proper active region and cavity designs, and techniques for reducing capacitance and thermal impedance, our fixed wavelength VCSELs have reached a modulation bandwidth of 23 GHz, which has enabled error-free 40 Gbps back-to-back transmission and 35 Gbps transmission over 100 m of multimode fiber. A MEMS-technology for wafer scale integration of tunable high speed VCSELs has also been developed. A tuning range of 24 nm and a modulation bandwidth of 6 GHz have been achieved, enabling error-free back-to-back transmission at 5 Gbps.
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