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Ceramic Pressure Se...
Ceramic Pressure Sensor for High Temperatures – Investigation of the Effect of Metallizationon on Read Range
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- Sturesson, Peter, 1981- (författare)
- Försvarshögskolan,Uppsala universitet,Mikrosystemteknik,Swedish Def Univ, Dept Mil Sci, S-11428 Stockholm, Sweden.,Ångström Space Technology Centre (ÅSTC), Ångström Space Technology Centre (ÅSTC),Sektionen för militärtekniska system (MteS),Uppsala Univ, Dept Engn Sci, Angstrom Space Technol Ctr, Sweden; Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden
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- Khaji, Zahra (författare)
- Uppsala universitet,Mikrosystemteknik,Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden,ÅSTC
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- Klintberg, Lena (författare)
- Uppsala universitet,Mikrosystemteknik,Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden,MST
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- Thornell, Greger, 1969- (författare)
- Uppsala universitet,Mikrosystemteknik,Ångström Space Technology Centre (ÅSTC), Ångström Space Technology Centre (ÅSTC),Uppsala Univ, Dept Engn Sci, Angstrom Space Technol Ctr, Sweden; Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden
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(creator_code:org_t)
- 2017
- 2017
- Engelska.
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Ingår i: IEEE Sensors Journal. - 1530-437X .- 1558-1748. ; 17:8, s. 2411-2421
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- A study on the relationship between circuit metallization, made by double-layer screen printing of platinum and electroplating of silver on top of platinum, and its impact on practical read range of ceramic LC resonators for high-temperature pressure measurements is presented. Also included is the first realization of membranes by draping a graphite insert with ceramic green body sheets. As a quality factor circuit reference, two-port microstrip meander devices were positively evaluated and to study interdiffusion between silver and platinum, test samples were annealed at 500 degrees C, 700 degrees C, and 900 degrees C for 4, 36, 72, and 96 h. The LC resonators were fabricated with both metallization methods, and the practical read range at room temperature was evaluated. Pressure-sensitive membranes were characterized for pressures up to 2.5 bar at room temperature, 500 degrees C and up to 900 degrees C. Samples electroplated with silver exhibited performance equal to or better than double-layer platinum samples for up to 60 h at 500 degrees C, 20 h at 700 degrees C, and for 1 h at 900 degrees C, which was correlated with the degree of interdiffusion as determined from cross-sectional analysis. The LC resonator samples with double-layer platinum exhibited a read range of 61 mm, and the samples with platinum and silver exhibited a read range of 59 mm. The lowest sheet resistance, and, thereby, the highest read range of 86 mm, was obtained with a silver electroplated LC resonator sample after 36 h of annealing at 500 degrees C.
Ämnesord
- NATURVETENSKAP -- Fysik -- Acceleratorfysik och instrumentering (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Accelerator Physics and Instrumentation (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Maskinteknik -- Rymd- och flygteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Mechanical Engineering -- Aerospace Engineering (hsv//eng)
Nyckelord
- Alternative metallization
- ceramic membrane
- harsh environment sensor
- high temperature co-fired ceramics (HTCC)
- HTCC processing
- LC resonator
- pressure sensor
- wireless reading
- Teknisk fysik med inriktning mot mikrosystemteknik
- Engineering Science with specialization in Microsystems Technology
- Försvarssystem
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