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- Anderås, Emil, 1982-, et al.
(författare)
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Tilted c-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity
- 2012
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Ingår i: IEEE Sensors Journal. - 1530-437X .- 1558-1748. ; 12:8, s. 2653-2654
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Tidskriftsartikel (refereegranskat)abstract
- Aluminum nitride thin film bulk wave resonant pressure sensors employing c- and tilted c-axis texture, have been fabricated and tested for their pressure sensitivities. The c-axis tilted FBAR pressure sensors demonstrate substantially higher pressure sensitivity compared to its c-axis oriented counterpart. More specifically the thickness plate quasi-shear resonance has demonstrated the highest pressure sensitivity while further being able to preserve its performance in liquid environment.
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2. |
- Arapan, Lilia, et al.
(författare)
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Sensitivity Features of Thin Film Plate Acoustic Wave Resonators
- 2011
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Ingår i: IEEE Sensors Journal. - : IEEE Sensors Council. - 1530-437X .- 1558-1748. ; 11:12, s. 3330-3331
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Tidskriftsartikel (refereegranskat)abstract
- Thin film plate acoustic resonators devices operating in the lowest order symmetric Lamb wave mode (S0) in coriented aluminum nitride (AlN) membranes on Si were fabricated and tested for their sensitivities to pressure and mass as well as for their ability to work in liquid environment.
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3. |
- Enlund, Johannes, et al.
(författare)
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FBAR sensor array for in liquid operation
- 2010
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Ingår i: IEEE Sensors Journal. - 1530-437X .- 1558-1748. ; 10:12, s. 1903-1904
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Tidskriftsartikel (refereegranskat)abstract
- This letter discusses the design of thickness shear mode thin-film bulk acoustic resonator (FBAR) sensor array for in liquid operation with respect to minimizing the observed Q-degradation and crosstalk.
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