| 1. |
- Berglund, Martin, 1985-, et al.
(författare)
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Extreme-temperature lab on a chip for optogalvanic spectroscopy of ultra small samples – key components and a first integration attempt
- 2016
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Ingår i: 27th Micromechanics And Microsystems Europe Workshop (MME 2016). - : Institute of Physics (IOP).
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Konferensbidrag (refereegranskat)abstract
- This is a short summary of the authors’ recent R&D on valves, combustors, plasma sources, and pressure and temperature sensors, realized in high-temperature co-fired ceramics, and an account for the first attempt to monolithically integrate them to form a lab on a chip for sample administration, preparation and analysis, as a stage in optogalvanic spectroscopy.
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| 2. |
- Persson, Anders, 1982-
(författare)
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Magnetoresistance and Space : Micro- and Nanofeature Sensors Designed, Manufactured and Evaluated for Space Magnetic Field Investigations
- 2011
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Doktorsavhandling (övrigt vetenskapligt/konstnärligt)abstract
- In recent years, the interest for miniaturization of spaceborne instruments and subsystems has increased steadily, as this enables development of small and lightweight satellite classes as well as more versatile payloads on traditional spacecraft. In essence, this thesis work is an investigation of the applicability of magnetoresistive technology to a magnetometer intended for space. Two types of magnetoresistive sensors, promising with respect to performance competiveness also after considerable miniaturization, were developed and evaluated, namely magnetic tunnel junctions and planar Hall effect bridge sensors. In the case of the magnetic tunnel junctions, much effort was put on the micromanufacturing process. Two schemes were developed and evaluated for sensor contouring: one employing focused ion beam processes for rapid prototyping, and the other combining sputtering and x-ray photoelectron spectroscopy for precise etch depth monitoring during ion etching. For the former, the resulting implantation damages were investigated with chemical analysis and correlated to the sensor properties. In the latter, the depth of the etching was monitored live with a resolution sufficient to stop the etching in the 1 nm thick tunneling barrier. The effect and extent of redeposition were investigated by transmission electron microscopy and micromagnetic analysis. With the knowledge so gained, the tunneling magnetoresistance of the manufactured junctions could be improved significantly and their inherent noise could be reduced. As a step in space flight qualification, the magnetic tunnel junctions were subjected to both g and particle radiation, leaving them unaffected by the first, but rendering them a reduced tunneling magnetoresistance ratio and an increased coercivity by the latter. In the case of the planar Hall effect bridge sensors, their inherent noise was thoroughly investigated, revealing both electric and magnetic 1/f noise at low frequencies along with thermal noise at higher frequencies. In addition, an analytical model of the magnetic properties of the planar Hall effect bridges was developed, and a design process, based on the model, was established to optimize the bridges for a particular application. In conclusion, both types of sensors show great promises for use in space. Of the two, the planar Hall effect bridge sensors had a better detection limit at low frequencies, whereas the magnetic tunnel junctions were more precise at higher frequencies. However, both sensors had a bandwidth greatly exceeding that of traditional spaceborne magnetometers. A magnetometer employing the magnetic tunnel junctions from this work is currently included as payload onboard the Vietnamese satellite F-1 scheduled for launch this year. A magnetometer using magnetoresistive sensors – planar Hall effect sensors, magnetic tunnel junctions, or both – enables a mass reduction of more than two orders of magnitudes compared with traditional systems.
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| 3. |
- Sturesson, Peter, 1981-, et al.
(författare)
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Pirani Microgauge Fabricated of High-Temperature Co-fired Ceramics with Integrated Platinum Wires
- 2019
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Ingår i: Sensors and Actuators A-Physical. - : Elsevier BV. - 0924-4247 .- 1873-3069. ; 285, s. 8-16
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Tidskriftsartikel (refereegranskat)abstract
- This paper presents the integration and pressure sensor operation of platinum bond wires in High-Temperature Co-fired alumina (HTCC). Devices were fabricated with a 50 μm diameter wire suspended across a 500 μm wide cavity in green-body state HTCC, electrically connected to screen printed alumina conductors. The substrate shrinkage during sintering to a cavity width of 400 μm causes the wire element to elevate from the cavity´s bottom surface. Resulting devices were compared with reference devices, containing screen-printed sensor elements, as Pirani gauges operated at 100 °C in constant-resistance mode, and in dynamic mode with a feeding current of 1 A in a pressure range from 10−4 Torr to atmospheric pressure. Also, devices with wire lengths between 500 and 3500 μm were operated and studied in constant-resistance and dynamic mode. Lastly, a device is demonstrated in operation at a mean temperature of 830 °C. The results include wire elements with a consistent elevation from their substrate surfaces, with irregularities along the wires. The wire devices exhibit a faster pressure response in dynamic mode than the reference devices do but operate similarly in constant-resistance mode. Increasing the wire element length shows an increasing dynamic pressure range but a decreasing maximum sensitivity. The sensitivity is retained in high temperature mode, but the dynamic range is extended from about 10 Torr to about 700 Torr.
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| 4. |
- Jonsson, Jonas, et al.
(författare)
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Enclosure-Induced Interference Effects in a Miniaturized Sidescan Sonar
- 2012
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Ingår i: IEEE Journal of Oceanic Engineering. - 0364-9059 .- 1558-1691. ; 37:2, s. 236-243
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Tidskriftsartikel (refereegranskat)abstract
- On, for instance, the miniaturized submersible explorer, Deeper Access, Deeper Understanding (DADU), only 20 cm in length and 5 cm in diameter, the sidescan sonar needs to be tightly mounted in the hull. Finite element analysis (FEA) as well as physical measurements were used to investigate the effects of beam interaction with acoustically nearby rigid boundaries. Computer simulations showed the first major dip in the beam shape to vary in strength, size, and position with the enclosure wall height, from a position of 47° at 0.0-mm wall height to 32° at 3.0-mm wall height. Hydrophonic measurements on the manufactured test device confirmed these values to within 9%, varying between 47° and 29°. In addition, Schlieren imaging was proposed and used as a noninvasive means of qualitative beam shape characterization. A field test was performed with the enclosure height set to 0 and 3 mm. With the latter height, a dark band, corresponding to a sonar sensitivity dip at about 30° in the beam, appeared in the sonar image. It was found that the beam shape is sensitive to small mounting errors, in this case where the wavelength of the sonar is on the same size scale as the enclosure. Furthermore, it was found that FEA models can be used to accurately predict enclosure effects on sonar beam shapes, and Schlieren imaging can be used to visually detect the shape deformations in mounted sonar devices.
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| 5. |
- Jonsson, Jonas, 1979-, et al.
(författare)
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Simulation, manufacturing, and evaluation of a sonar for a miniaturized submersible explorer
- 2010
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Ingår i: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. - 0885-3010 .- 1525-8955. ; 57:2, s. 490-495
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Tidskriftsartikel (refereegranskat)abstract
- Single-beam side-scan sonar elements, to be fitted on a miniaturized submersible, are here simulated, manufactured, and evaluated. Finite element analysis simulations are compared with measurements, and an overall observation is that the agreement between simulations and measurements deviates from the measured values of 1.5 to 2°, for the narrow lobe angle, by less than 10% for most models. An overall finding is that the lobe width along the track direction can be accurately simulated and, hence, the resolution of the sonars can be predicted. This paper presents, to the authors’ knowledge, the world’s smallest side-scan sonars.
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| 6. |
- Khaji, Zahra, et al.
(författare)
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Investigation of the storage and release of oxygen in a Cu-Pt element of a high-temperature microcombustor
- 2014
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Ingår i: The 14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications(PowerMEMS 2014). - : Institute of Physics (IOP).
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Konferensbidrag (refereegranskat)abstract
- A miniature combustor for converting organic samples into CO2 with application in carbon isotopic measurements has been manufactured and evaluated. The combustor was made of High-Temperature Co-fired Ceramic (HTCC) alumina green tapes. The device has a built-in screen printed heater and a temperature sensor made of platinum, co-sintered with the ceramic. A copper oxide oxygen supply was added to the combustor after sintering by in-situ electroplating of copper on the heater pattern followed by thermal oxidation. Scanning Electron Microscopy (SEM), Energy Dispersive Spectroscopy (EDS) and Thermal Gravimetric Analysis (TGA) were used to study electroplating, oxidation and the oxide reduction processes. The temperature sensor was calibrated by use of a thermocouple. It demonstrates a temperature coefficient resistance of 4.66×10−3/°C between 32 and 660 °C. The heat characterization was done up to 1000 °C by using IR thermography, and the results were compared with the data from the temperature sensor. Combustion of starch confirmed the feasibility of using copper oxide as the source of oxygen of combustion.
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| 7. |
- Sturesson, Peter, 1981-
(författare)
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Sense, Actuate and Survive : Ceramic Microsystems for High-Temperature Aerospace Applications
- 2018
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Doktorsavhandling (övrigt vetenskapligt/konstnärligt)abstract
- In aerospace applications, but also in manufacturing, mining, energy industry and natural hazards, high temperature, corrosion, erosion and radiation, challenge the performance and being of hardware.In this work, high-temperature co-fired ceramic (HTCC) alumina and platinum have been used for a range of devices intended for aerospace applications at up to 1000°C.The thermomechanics of a pressure sensor was investigated, and the interfacing was attained by wireless powering and reading. However, read range was limited and sensitivity decreased with temperature. Silver, electroplated after sintering, was found to remedy this until it eventually alloyed with platinum.Copper was electroplated and oxidized for oxygen storage in a microcombustor, intended for sample preparation for optogalvanic spectroscopy (OGS) to indicate extraterrestrial life. Despite delamination, caused by residual stresses, the device operated successfully.Conversely, pre-firing metallization by integration of platinum wires was studied. Freely suspended, and despite heat-induced shape irregularities, these were found advantageous over screen printed elements for gas heating, and temperature and pressure sensing. By fusing off the wires, spherical tips, allowing for impedance monitoring of microplasma sources in, e.g., OGS, were formed.Microplasma sources can also be used for gas heating. This, together with screen printed and suspended resistive heaters, was evaluated in a microthruster, showing that plasma heating is the most effective, implying fuel consumption reduction in satellite propulsion.In conclusion, HTCC alumina microdevices are thermally stable and could benefit several aerospace applications, especially with the complementary metallization schemes devised here.Future developments are expected to include both processing and design, all with the intention of sensing, actuating and surviving in high-temperature environments.
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| 8. |
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| 9. |
- Lekholm, Ville, 1976-, et al.
(författare)
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Ceramic cold gas microthruster with integrated flow sensor
- 2011
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Ingår i: PowerMEMS 2011 Technical digest. - Daejeon, Republic of Korea : Cell Bench Research Center, KAIST. - 9788996759102 ; , s. 167-170
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Konferensbidrag (refereegranskat)abstract
- For aggressive environments, the material properties of silicon become a limitation. Macroscopically, ceramics are as common for high-temperature applications as is silicon in miniaturized systems, but this group of materials has been little exploited for MEMS components. This paper describes the design, manufacturing and characterization of a ceramic, heated cold-gas microthruster with integrated flow sensor, using HTCC processing and silicon tools. The calorimetric flow sensor is integrated in the structure, and heaters are embedded in the stagnation chamber of the nozzle. The heater was shown to improve the efficiency of the thruster, as confirmed by measurements of the flow rate. Flow rate changes were seen as changes in resistance of the fabricated flow sensor. The choice of yttria stabilized zirconia as material for the components make them robust and capable of withstanding very high temperatures. Samples have been shown capable of achieving temperatures locally exceeding 1000ºC.
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| 10. |
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