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Measuring Compositions in Organic Depth Profiling: Results from a VAMAS Interlaboratory Study

Shard, A. G. (author)
National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom
Havelund, R. (author)
National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom
Fletcher, John S. (author)
Gothenburg University,Göteborgs universitet,Institutionen för kemi och molekylärbiologi,Department of Chemistry and Molecular Biology,Departmentof Chemistry and Molecular Biology, University of Gothenburg, Gothenburg 40530, Sweden
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Gilmore, I. S. (author)
National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom
Alexander, M. R. (author)
Laboratoryof Biophysics and Surface Analysis, University of Nottingham, Nottingham NG7 2RD, United Kingdom
Angerer, Tina B., 1987 (author)
Gothenburg University,Göteborgs universitet,Institutionen för kemi och molekylärbiologi,Department of Chemistry and Molecular Biology,University of Gothenburg,Departmentof Chemistry and Molecular Biology, University of Gothenburg, Gothenburg 40530, Sweden
Aoyagi, S. (author)
Departmentof Materials and Life Science, Seikei University, Tokyo 180-8633, Japan
Barnes, J. P. (author)
Université Grenoble Alpes, F-38000 Grenoble, France;CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
Benayad, A. (author)
Université Grenoble Alpes, F-38000 Grenoble, France;CEA-LITEN/DTNM, F-38054 Grenoble, France
Bernasik, A. (author)
AGH University of Science and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland
Ceccone, G. (author)
Institute for Health and Consumer Protection, Via E. Fermi 2749, TP125, 21027 Ispra (VA), Italy
Counsell, J. D. P. (author)
Kratos Analytical Ltd, Wharfside, Trafford Wharf Road, Manchester M17 1GP, United Kingdom
Deeks, C. (author)
Thermo Fisher Scientific, EastGrinstead, West Sussex RH19 1UB, United Kingdom
Fletcher, John S. (author)
Gothenburg University,Göteborgs universitet,Institutionen för kemi och molekylärbiologi,Department of Chemistry and Molecular Biology,University of Gothenburg
Graham, D. J. (author)
Departmentof Bioengineering, University of Washington, Seattle, Washington 98195, United States
Heuser, C. (author)
Facultyof Physics, University Duisburg-Essen, Lotharstraße 1, 47048 Duisburg, Germany
Lee, T. G. (author)
Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong-gu, Daejeon 305-340, Republic of Korea
Marie, C. (author)
Université Grenoble Alpes, F-38000 Grenoble, France;CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
Marzec, M. M. (author)
AGH University of Science and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland
Mishra, G. (author)
CorporateResearch Analytical Laboratory (CRAL), 3M Deutschland GmbH, Carl-Schurz-Straße1, Neuss 41460, Germany
Rading, D. (author)
ION-TOF GmbH, Heisenberg Straße15, D-48149 Münster, Germany
Renault, O. (author)
Université Grenoble Alpes, F-38000 Grenoble, France;CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
Scurr, D. J. (author)
Laboratoryof Biophysics and Surface Analysis, University of Nottingham, Nottingham NG7 2RD, United Kingdom
Shon, H. K. (author)
Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong-gu, Daejeon 305-340, Republic of Korea
Spampinato, V. (author)
Istituto di Fisica dei Plasmi, Consiglio Nazionale delle Ricerche, Via R. Cozzi 53, 20125 Milano, Italy
Tian, H. (author)
Pennsylvania State University, 104 Chemistry Building, University Park, Pennsylvania 16802, United States
Wang, F. Y. (author)
CASKey Laboratory of Analytical Chemistry for Living Biosystems, Chinese Academy of Sciences, Beijing 100190, China
Winograd, N. (author)
Pennsylvania State University, 104 Chemistry Building, University Park, Pennsylvania 16802, United States
Wu, K. (author)
CASKey Laboratory of Analytical Chemistry for Living Biosystems, Chinese Academy of Sciences, Beijing 100190, China
Wucher, A. (author)
Facultyof Physics, University Duisburg-Essen, Lotharstraße 1, 47048 Duisburg, Germany
Zhou, Y. F. (author)
EMSL, Pacific Northwest National Laboratory, Richland, Washington 99354, United States
Zhu, Z. H. (author)
EMSL, Pacific Northwest National Laboratory, Richland, Washington 99354, United States
Spencer, Steve J. (author)
National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom
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 (creator_code:org_t)
2015-08-06
2015
English.
In: Journal of Physical Chemistry B. - : American Chemical Society (ACS). - 1520-6106 .- 1520-5207. ; 119:33, s. 10784-10797
  • Journal article (peer-reviewed)
Abstract Subject headings
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  • We report the results of a VAMAS (Versailles Project on Advanced Materials and Standards) interlaboratory study on the measurement of composition in organic depth profiling. Layered samples with known binary compositions of Irganox 1010 and either Irganox 1098 or Fmoc-pentafluoro-L-phenylalanine in each layer were manufactured in a single batch and distributed to more than 20 participating laboratories. The samples were analyzed using argon cluster ion sputtering and either X-ray photoelectron spectroscopy (XPS) or time-of-flight secondary ion mass spectrometry (ToF-SIMS) to generate depth profiles. Participants were asked to estimate the volume fractions in two of the layers and were provided with the compositions of all other layers. Participants using XPS provided volume fractions within 0.03 of the nominal values. Participants using ToF-SIMS either made no attempt, or used various methods that gave results ranging in error from 0.02 to over 0.10 in volume fraction, the latter representing a 50% relative error for a nominal volume fraction of 0.2. Error was predominantly caused by inadequacy in the ability to compensate for primary ion intensity variations and the matrix effect in SIMS. Matrix effects in these materials appear to be more pronounced as the number of atoms in both the primary analytical ion and the secondary ion increase. Using the participants' data we show that organic SIMS matrix effects can be measured and are remarkably consistent between instruments. We provide recommendations for identifying and compensating for matrix effects. Finally, we demonstrate, using a simple normalization method, that virtually all ToF-SIMS participants could have obtained estimates of volume fraction that were at least as accurate and consistent as XPS.

Subject headings

NATURVETENSKAP  -- Kemi -- Analytisk kemi (hsv//swe)
NATURAL SCIENCES  -- Chemical Sciences -- Analytical Chemistry (hsv//eng)

Keyword

ION MASS-SPECTROMETRY
CLUSTER SPUTTERING YIELDS
UNIVERSAL EQUATION
SIZE-DEPENDENCE
TOF-SIMS
BEAMS
FILMS
SUPPRESSION
EFFICIENCY
EMISSION
Chemistry
Physical
SIZE-DEPENDENCE

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ref (subject category)
art (subject category)

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