| 1. |
- Ayerden, N.P., et al.
(författare)
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Design, fabrication and characterization of LVOF-based IR microspectrometers
- 2014
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Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE. - 0277-786X .- 1996-756X. - 9781628410785 ; 9130
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Konferensbidrag (refereegranskat)abstract
- This paper presents the design, fabrication and characterization of a linear variable optical filter (LVOF) that operates in the infrared (IR) spectral range. An LVOF-based microspectrometer is a tapered-cavity Fabry-Perot optical filter placed on top of a linear array of detectors. The filter transforms the optical spectrum into a lateral intensity profile, which is recorded by the detectors. The IR LVOF has been fabricated in an IC-compatible process flow using a resist reflow and is followed by the transfer etching of this resist pattern into the optical resonator layer. This technique provides the possibility to fabricate a small, robust and high-resolution micro-spectrometer in the IR spectral range directly on a detector chip. In these designs, the LVOF uses thin-film layers of sputtered Si and SiO 2 as the high and low refractive index materials respectively. By tuning the deposition conditions and analyzing the optical properties with a commercial ellipsometer, the refractive index for Si and SiO2 thin-films was measured and optimized for the intended spectral range. Two LVOF microspectrometers, one operating in the 1.8-2.8 μm, and the other in the 3.0-4.5 μm wavelength range, have been designed and fabricated on a silicon wafer. The filters consist of a Fabry-Perot structure combined with a band-pass filter to block the out-of-band transmission. Finally, the filters were fully characterized with an FTIR spectrometer and the transmission curve widening was investigated. The measured transmittance curves were in agreement with theory. The characterization shows a spectral resolution of 35-60 nm for the short wavelength range LVOF and 70 nm for the long wavelength range LVOF, which can be further improved using signal processing algorithms.
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| 2. |
- Silva, M. F., et al.
(författare)
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Magnesium fluoride as low-refractive index material for near-ultraviolet filters applied to optical sensors
- 2020
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Ingår i: Vacuum. - : Elsevier BV. - 0042-207X. ; 181
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Tidskriftsartikel (refereegranskat)abstract
- This article describes the fabrication of MgF2 and MgO thin-film-based optical filters and compares the optical transmission of the filters over UV. The MgF2 thin-films were deposited by use of an e-beam technique and their optical properties were characterised by ellipsometry. The effect of substrate temperature on the optical properties was studied. The MgF2 optimum refractive indices were obtained with a substrate temperature between 200 °C and 300 °C. Optical simulations were performed to compare the performance of MgF2 and MgO in the fabrication of near-UV narrow bandpass optical filters. While MgO-based optical filters result in a higher transmittance peak intensity, especially at 350 nm, the MgF2 optical filters are narrower, present lower values of FWHM, a mean value of 20 nm. This feature could be especially relevant for specific applications on fluorescent optical sensors. Finally, a Fabry-Perot based on a MgF2/TiO2 optical filter was deposited, using an e-beam technique for the MgF2 thin-films and RF-sputtering technique for the TiO2 thin-films. The MgF2/TiO2 optical filter peak transmittance is approximately 70% close to 400 nm, as expected. The results are discussed with focus on applications in fluorescent optical sensors for peaks at 350, 370, 380 and 400 nm, respectively.
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| 3. |
- Ayerden, N.P., et al.
(författare)
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A miniaturized optical gas-composition sensor with integrated sample chamber
- 2016
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Ingår i: Sensors and Actuators, B: Chemical. - : Elsevier BV. - 0925-4005. ; 236:29, s. 917-925
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Tidskriftsartikel (refereegranskat)abstract
- A robust and highly miniaturized optical gas sensor based on optical absorption spectroscopy is presented. By using the resonator cavity of a linear variable optical filter (LVOF) also as a gas chamber, a compact and robust optical sensor is achieved. The device operates at the 15th order in 3.2–3.4 μm wavelength range for distinguishing hydrocarbons. The physical cavity length at the μm-level is translated into an effective optical absorption path length at the mm-level by the use of highly reflective (R > 98%) Bragg mirrors. The optical design using the Fizeau interferometer approach is described. Moreover, the CMOS-compatible fabrication method is explained. In addition to the wideband and single wavelength filter characterization, absorption of methane in the LVOF cavity is demonstrated at 3392 nm and 3416.60 nm wavelengths.
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| 4. |
- Ghaderi, Mohammadamir, 1986, et al.
(författare)
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Self-Cleaning Micro-Windows for In-Tailpipe Optical Exhaust Gas Measurements
- 2020
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Ingår i: IEEE International Symposium on Industrial Electronics. ; 2020-June, s. 1104-1108
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Konferensbidrag (refereegranskat)abstract
- Exhaust gas measurement in the harsh environment of the tailpipe of a combustion engine by optical techniques is a highly robust technique, provided that optical access is maintained in the presence of particulate matter (PM). The considerations are presented for the systematic design of membranes with integrated heaters in SiC-on-Si technology for generating a well-defined lateral temperature profile with peak temperatures above 600 °C. Periodically raising the temperature of the membranes to such a level is demonstrated to keep the surface transparent by oxidation of soot deposits. This paper is about continuous heating of the membrane to a temperature slightly higher than that of the exhaust gas. At such temperatures thermophoretic repulsion of PM allows allows long-term optical measurement in the exhaust without the thermo-mechanical loading by repetitive thermal cycling.
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| 5. |
- Middelburg, Luke M., et al.
(författare)
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Impedance Spectroscopy for Enhanced Data Collection of Conductometric Soot Sensors
- 2020
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Ingår i: IEEE International Symposium on Industrial Electronics. ; 2020-June, s. 1099-1103
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Konferensbidrag (refereegranskat)abstract
- Impedance spectroscopy in the frequency range 100 Hz to 10 kHz has been applied to the Inter-Digitated Electrode (IDE) structure that is conventionally operated as a resistive sensor for the measurement of Particulate Matter (PM). The measurement of both the in-phase (resistive) and out-of-phase (capacitive) components of the impedance over this frequency range provides more data on PM as compared to DC resistance measurement only. Experimental validation confirms a more gradual change in capacitance with soot buildup as compared to the sudden reduction of resistance with dendrite formation. The effect of an additional vertical electric field for an increased capacitive sensitivity due to stimulated soot buildup has been experimentally investigated using the electrically conductive flow housing of the IDE structure as an additional suspended electrode.
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| 6. |
- Mandon, J., et al.
(författare)
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A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy
- 2017
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Ingår i: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). - 1084-6999. ; , s. 1052-1055
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Konferensbidrag (refereegranskat)abstract
- This paper demonstrates the functional integration of a linear variable optical filter (LVOF) and a gas cell at the wafer level, i.e. a gas-filled LVOF, where the resonator cavity of the filter is also used for storing the gas sample. A mm-level effective optical absorption path length is achieved from a μm-level physical path length, by exploiting multiple reflections from highly reflective Bragg mirrors and the high-order operation of the filter. The wideband spectral response of the device is ensured by using a tapered cavity, where the cavity length changes linearly along the length of the filter. Therefore, combined with a detector array and a light source, the gas-filled LVOF enables wideband operation and long absorption path in a single MEMS device, thus ensuring a highly sensitive on-chip gas absorption microspectrometer.
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| 7. |
- Middelburg, Luke M., et al.
(författare)
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Maintaining transparency of a heated MEMs membrane for enabling long-term optical measurements on soot-containing exhaust gas
- 2020
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Ingår i: Sensors. - : MDPI AG. - 1424-8220. ; 20:1
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Tidskriftsartikel (refereegranskat)abstract
- Ensuring optical transparency over a wide spectral range of a window with a view into the tailpipe of the combustion engine, while it is exposed to the harsh environment of sootcontaining exhaust gas, is an essential pre-requisite for introducing optical techniques for long-term monitoring of automotive emissions. Therefore, a regenerable window composed of an optically transparent polysilicon-carbide membrane with a diameter ranging from 100 µm up to 2000 µm has been fabricated in microelectromechanical systems (MEMS) technology. In the first operating mode, window transparency is periodically restored by pulsed heating of the membrane using an integrated resistor for heating to temperatures that result in oxidation of deposited soot (600–700 °C). In the second mode, the membrane is kept transparent by repelling soot particles using thermophoresis. The same integrated resistor is used to yield a temperature gradient by continuous moderate-temperature heating. Realized devices have been subjected to laboratory soot exposure experiments. Membrane temperatures exceeding 500 °C have been achieved without damage to the membrane. Moreover, heating of membranes to ΔT = 40 °C above gas temperature provides sufficient thermophoretic repulsion to prevent particle deposition and maintain transparency at high soot exposure, while non-heated identical membranes on the same die and at the same exposure are heavily contaminated.
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| 8. |
- Barnett, M.R., et al.
(författare)
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Role of grain boundary sliding in the anisotropy of magnesium alloys
- 2009
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Ingår i: Scripta Materialia. - : Elsevier BV. - 1359-6462 .- 1872-8456. ; 61:3, s. 277-280
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Tidskriftsartikel (refereegranskat)abstract
- The plastic anisotropy of magnesium alloy sheet drops rapidly with test temperature. It has previously been suggested that this may be due to an increase in the activity of 〈c+a〉 dislocations. The present note points out that the phenomenon may result, instead, from the action of grain boundary sliding. This can explain the strong effect of grain size on anisotropy. Furthermore, it points to a new avenue for alloy development. © 2009 Acta Materialia Inc.
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| 9. |
- Ghaderi, M., et al.
(författare)
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Design, fabrication and characterization of infrared LVOFs for measuring gas composition
- 2014
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Ingår i: Journal of Micromechanics and Microengineering. - : IOP Publishing. - 1361-6439 .- 0960-1317. ; 24:8, s. Art. no. 084001-
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Tidskriftsartikel (refereegranskat)abstract
- This paper presents the design, fabrication and characterization of a linear-variable optical-filter (LVOF) that will be used in a micro-spectrometer operating in infrared (IR) for natural gas composition measurement. An LVOF is placed on top of an array of detectors and transforms the optical spectrum into a lateral intensity profile, which is recorded by the detectors. The IR LVOF was fabricated in an IC-compatible process using a photoresist reflow technique, followed by transfer etching of the photoresist into the optical resonator layer. The spectral range between 3 to 5 mu m contains the absorption peaks for hydrocarbons, carbon-monoxide and carbon-dioxide. The resulting optical absorption is utilized to measure the gas concentrations in a sample volume. Two LVOF structures were designed and fabricated on silicon wafers using alternate layers of sputtered silicon and silicon-dioxide as the high- and low- refractive index materials. These filters consist of a Fabry-Perot resonator combined with a band-pass filter designed to block out-of-band transmissions. Finally, the filters were fully characterized with an FTIR spectrometer and showed satisfactory agreement with the optical thin-film simulations. The characterization showed a spectral resolution of 100 nm, which can be further improved with signal processing algorithms. This method makes it possible to fabricate small and robust LVOFs with high resolving power in the IR spectral range directly on the detector array chip.
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| 10. |
- Hutchinson, Bevis, et al.
(författare)
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Deformation modes and anisotropy in magnesium alloy AZ31
- 2009
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Ingår i: International Journal of Materials Research - Zeitschrift für Metallkunde. - : Walter de Gruyter GmbH. - 1862-5282 .- 2195-8556. ; 100:4, s. 556-563
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Tidskriftsartikel (refereegranskat)abstract
- A strongly textured sheet of magnesium alloy AZ31 has been subjected to tensile testing at temperatures between ambient and 300 °C. Structures have been examined by optical and transmission electron microscopy and also by atomic force microscopy to quantify surface displacements seen at grain boundaries. Plastic anisotropy varies strongly with test temperature as was observed previously by Agnew and Duygulu. The present findings do not support the view that crystallographic becomes a major contributor to deformation at higher temperatures. Rather, the material behaviour reflects an increasing contribution from grain boundary sliding despite the relatively high strain rate (10-3 s-1 ) used in the mechanical tests. © Carl Hanser Verlag GmbH & Co. KG.
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