| 1. |
- Hansson, B. A. M., et al.
(author)
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Characterisation of a liquid-xenon jet laser-plasma extreme-ultraviolet source
- 2004
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In: Review of Scientific Instruments. - : AIP Publishing. - 0034-6748 .- 1089-7623. ; 75:6, s. 2122-2129
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Journal article (peer-reviewed)abstract
- A liquid-xenon-jet laser-plasma source for extreme-ultraviolet (EUV) and soft-x-ray generation has been characterized. Being a source candidate for EUV lithography (EUVL), we especially focus on parameters important for the integration of the source in EUVL systems. The deep-ultraviolet (DUV) out-of-band radiation (=120–400 nm) was quantified, to within a factor of two, using a flying-circus tool together with a transmission-grating spectrograph resulting in a total DUV conversion efficiency (CE) of ~0.33%/2sr. The size and the shape of the xenon plasma was investigated using an in-band-only EUV microscope, based on a spherical Mo/Si multilayer mirror and a charge-coupled device detector. Scalability of the source size from 20–270 µm full width at half maximum was shown. The maximum repetition-rate sustainable by the liquid-xenon-jet target was simulated by a double-pulse experiment indicating feasibility of >17 kHz operation. The xenon-ion energy distribution from the plasma was determined in a time-of-flight experiment with a Faraday-cup detector showing the presence of multi-kilo-electron-volt ions. Sputtering of silicon witness plates exposed to the plasma was observed, while a xenon background of >1 mbar was shown to eliminate the sputtering. It is concluded that the source has potential to meet the requirements of future EUVL systems.
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| 2. |
- Rodriguez-Navas, Guillermo, et al.
(author)
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Automated specification and verification of functional safety in heavy-vehicles : The verispec approach
- 2014
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In: Proceedings - Design Automation Conference. - New York, NY, USA : ACM. - 9781479930173
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Conference paper (peer-reviewed)abstract
- ISO 26262 is the new standard for automotive functional safety. This standard identies major process steps across a large number of system stages as well as safety-related artifacts required as input and output of these steps. The VeriSpec project intends to identify the main challenges for the adoption of ISO 26262 by the heavy-vehicle industry and to provide useful and industrially relevant components (methods, tools etc.) required by the standard. The project work targets two main research goals: (i) requirement formalization support, including a usable front-end for specifying requirements by using patterns, and (ii) formal analysis of realizations in form of architectural models at various levels of abstraction, by model-checking the formal representations of the latter. In this paper, we present the current challenges facing industry and justifying VeriSpec, together with a preliminary roadmap for the research.
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