1. |
- Hillmer, H., et al.
(författare)
-
Wide continuously tunable 1.55 μm vertical air-cavity wavelength selective elements for filters and VCSELs using micromachined actuation
- 2005
-
Ingår i: Opto-Ireland 2005. - : SPIE - International Society for Optical Engineering. - 0819458104 ; , s. 14-28
-
Konferensbidrag (refereegranskat)abstract
- Tailored scaling allows the effectiveness of physical effects and mechanical stability to be enhanced. This is shown for micromachined 1.55μm vertical-resonator-based filters and VCSELs, capable of wide, continuous, and kink-free tuning by a single control parameter. Tuning is achieved by mechanically actuating one or several membranes in a vertical air-gap resonator including two highly reflective DBR mirrors. Electrostatically actuatable single-chip filters including InP/air-gap DBR's (3.5 periods) reveal a continuous tuning up to 14% of the absolute wavelength. Varying a reverse voltage (U=0 .. -3.2V) between the membranes (almost flat in the unactuated condition) a tuning range up to 142nm was obtained. Varying a reverse voltage (U=0 .. -28V) between the membranes (strained and curved in the unactuated condition) a tuning range up to 221nm was obtained. Optically pumped and continuously tunable 1.55μm VCSELs show 26nm spectral tuning range, 400μW maximum output power, and 57dBm SMSR. This two-chip VCSEL has a movable top mirror membrane, which is precisely designed to obtain a specific air-gap length and a tailored radius of curvature in order to efficiently support the fundamental optical mode of the plane-concave resonator. The curved top mirror DBR membrane consists of periodically alternating differently stressed silicon nitride and silicon dioxide multilayers. The lower InP-based part consists of the InP/GaInAsP bottom DBR and the GaInAsP active region.
|
|
2. |
- Tarraf, A., et al.
(författare)
-
Continuously tunable 1.55-mu m VCSEL implemented by precisely curved dielectric top DBR involving tailored stress
- 2004
-
Ingår i: IEEE Photonics Technology Letters. - 1041-1135 .- 1941-0174. ; 16:3, s. 720-722
-
Tidskriftsartikel (refereegranskat)abstract
- We present an optically pumped and continuously tunable 1.55-mum vertical-cavity surface-emitting laser (VCSEL). The device shows. 26-mn spectral tuning range, 400-muW maximum output power, and 57-dBm side-mode suppression ratio. The VCSEL is implemented using a two-chip concept. The movable top mirror membrane is precisely designed to obtain a tailored air-gap length (L' = 16 mum) and a radius of curvature (ROC = 4.5 mm) in order to efficiently support the fundamental optical mode of the plane-concave resonator. It consists of a distributed Bragg reflector (DBR) with periodic, differently stressed silicon nitride and silicon dioxide multilayers implemented by plasma-enhanced chemical vapor deposition. The lower InP-based part, comprising the InP-InGaAsP bottom DBR and the active region, is grown monolithicaily using metal-organic vapor phase epitaxy.
|
|