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- Gustavsson, Johan, 1974, et al.
(författare)
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Mode and polarization control in VCSELs using shallow surface structures
- 2007
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Ingår i: IET Optoelectronics. ; 1:5, s. 197-205
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Tidskriftsartikel (refereegranskat)abstract
- Monolithic techniques for mode and polarisation control in vertical-cavity surface emitting lasers (VCSELs) using shallow surface structures are summarized and put in the context with other techniques in terms of performance and manufacturability. The method of using circular-symmetric surface structures for mode control and their combination with a sub-wavelength surface grating for simultaneous mode and polarisation control is described in detail, and adherent experimental results for both 850-nm and 1.3-µm oxide-confined VCSELs are presented.
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| 7. |
- Jedrasik, Piotr, 1957, et al.
(författare)
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Technological and Material Related Challenges for Large Area, High Aspect-Ratio, Near Teradot/Inch(2) Areal Density and Three-Dimensional Structuring of Polyaniline
- 2011
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Ingår i: Journal of Nanoscience and Nanotechnology. - : American Scientific Publishers. - 1533-4880 .- 1533-4899. ; 11:10, s. 8924-8935
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Tidskriftsartikel (refereegranskat)abstract
- In this manuscript we report on a newly developed technology for the nanoscale processing of the conducting polyaniline (PANI) with an unprecedented areal patterning order and density control exceeding 0.25 teradot/inch(2). High resolution electron beam lithography was used to generate ordered 2D and 3D templates. A novel type of resist and dose-modulated 3D-electron beam lithography (RDM-3D-EBL), extensively exploiting the intrinsic properties of resist-electron beam interaction is detailed. Surface initiated and template confined aniline polymerization, through catalytic activity of metallic platinum, was then exploited to provide a genuine method for controlled nanoscale processing of polyaniline, a prototypical conjugated polymer that definitively settled the concept of synthetic metals. Using nanoscale polymerization reactors, ultimate resolution patterning and processing control of single polyaniline nanostructures was feasible. Aspects of the nanoscale polyaniline growth mechanism are discussed and the highly controllable, sub-picogram scale fabrication is emphasized. Near teradot/inch(2) pattern transfer technology, complex 3D structuring and physico-chemical functionalization of polyaniline can be subsequently harnessed to build a large variety of architectures with potential for emerging optoelectronic technologies. The method is scalable, can be applied on virtually any type of flexible or rigid substrates and provides a generic approach for nanopatterning surfaces with functional polymers. Technological and material related fabrication challenges are detailed and discussed.
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| 8. |
- Rommel, Marcus, 1987, et al.
(författare)
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Sub-10 nm resolution after lift-off using HSQ./PMMA double layer resist
- 2013
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Ingår i: Microelectronic Engineering. - : Elsevier BV. - 0167-9317. ; 110, s. 123-125
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Tidskriftsartikel (refereegranskat)abstract
- Hydrogen silesquioxan (HSQ) is a well-investigated negative tone inorganic resist [1,2] which is known for its capabilities for high resolution electron beam lithography (EBL) and its stability against dry etching [3]. In this paper, we introduce a process to create dense structures by EBL utilizing a layer of polymethyl-methacrylate (PMMA) as sacrificial layer beneath a HSQ layer. The sacrificial layer allows a simple lift-off process to remove the HSQ with organic solvents and thus avoids the use of hydrofluoric acid (HF) containing etchants, which is the commonly used HSQ remover [4]. The described double layer resist system allows patterning on substrates that are not HF compatible such as glass or oxide compounds, achieving a high resolution down to the sub-10 nm regime. Despite the use of a double layer resist, this process is applicable for arbitrarily large areas due to the remaining PMMA underneath the HSQ and the avoidance of undercuts.
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| 9. |
- Stockhausen, A., et al.
(författare)
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Adjustment of self-heating in long superconducting thin film NbN microbridges
- 2012
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Ingår i: Superconductor Science and Technology. - : IOP Publishing. - 0953-2048 .- 1361-6668. ; 25:3
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Tidskriftsartikel (refereegranskat)abstract
- The self-heating in long superconducting microbridges made from thin NbN films deposited on top of high silicon mesa structures was studied by analyzing the hysteresis current density j(H). We observed a more than twofold decrease of j(H) with increase in the ratio of the height of the Si mesa, h, to the width of the microbridge, W, from 0 to 24. We describe our experimental results using one-dimensional thermal balance equations taking into account disordered matter in our thin NbN films and limitations imposed on the phonon mean free path by the width of the Si mesa. In the framework of this model we obtain a good agreement between theory and experiment over a wide temperature range from 4.2 K up to the critical temperature T-C for all h/W ratios.
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| 10. |
- Vlad, A., et al.
(författare)
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Highly Ordered Conjugated Polymer Nanoarchitectures with Three-Dimensional Structural Control
- 2009
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Ingår i: Nano Letters. - : American Chemical Society (ACS). - 1530-6992 .- 1530-6984. ; 9:8, s. 2838-2843
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Tidskriftsartikel (refereegranskat)abstract
- Conductive polymers are a class of materials with vast potential for tomorrow's ultra-large-scale technologies as they combine structural and functional diversity with flexible synthesis and processing approaches. A missing component, with their subtle chemical structure, is reliable building at nanoscale. Here we report on the patterning of polyaniline, a prototypical conjugated polymer, with an unprecedented areal patterning order and density exceeding 0.25 teradot/inch(2), With template-confined growth, through platinum-surface-catalyzed polymerization of aniline, highly ordered arrays of distinct polyaniline nanowires are produced with a typical diameter
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