| 1. |
- Hong, J., et al.
(författare)
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Plasma chemistries for high density plasma etching of SiC
- 1999
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Ingår i: Journal of Electronic Materials. - Charlottesville, VA, USA. - 0361-5235 .- 1543-186X. ; 28:3, s. 196-201
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Tidskriftsartikel (refereegranskat)abstract
- A variety of different plasma chemistries, including SF6, Cl2, ICI, and IBr, have been examined for dry etching of 6H-SiC in high ion density plasma tools (inductively coupled plasma and electron cyclotron resonance). Rates up to 4500 angstroms·min-1 were obtained for SF6 plasmas, while much lower rates (≀800 angstroms·min-1) were achieved with Cl2, ICI, and IBr. The F2-based chemistries have poor selectivity for SiC over photoresist masks (typically 0.4-0.5), but Ni masks are more robust, and allow etch depths ≥10 Όm in the SiC. A micromachining process (sequential etch/deposition steps) designed for Si produces relatively low etch rates (<2,000 angstroms·min-1) for SiC.
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| 2. |
- Sánchez-Cano, Beatriz, et al.
(författare)
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Mars’ plasma system. Scientific potential of coordinated multipoint missions : "The next generation"
- 2022
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Ingår i: Experimental astronomy. - : Springer. - 0922-6435 .- 1572-9508. ; 54, s. 641-676
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Tidskriftsartikel (refereegranskat)abstract
- The objective of this White Paper, submitted to ESA’s Voyage 2050 call, is to get a more holistic knowledge of the dynamics of the Martian plasma system, from its surface up to the undisturbed solar wind outside of the induced magnetosphere. This can only be achieved with coordinated multi-point observations with high temporal resolution as they have the scientific potential to track the whole dynamics of the system (from small to large scales), and they constitute the next generation of the exploration of Mars analogous to what happened at Earth a few decades ago. This White Paper discusses the key science questions that are still open at Mars and how they could be addressed with coordinated multipoint missions. The main science questions are: (i) How does solar wind driving impact the dynamics of the magnetosphere and ionosphere? (ii) What is the structure and nature of the tail of Mars’ magnetosphere at all scales? (iii) How does the lower atmosphere couple to the upper atmosphere? (iv) Why should we have a permanent in-situ Space Weather monitor at Mars? Each science question is devoted to a specific plasma region, and includes several specific scientific objectives to study in the coming decades. In addition, two mission concepts are also proposed based on coordinated multi-point science from a constellation of orbiting and ground-based platforms, which focus on understanding and solving the current science gaps.
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| 3. |
- Opgenoorth, Hermann J., et al.
(författare)
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Assessment and recommendations for a consolidated European approach to space weather - as part of a global space weather effort
- 2019
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Ingår i: Journal of Space Weather and Space Climate. - : EDP Sciences. - 2115-7251. ; 9
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Tidskriftsartikel (refereegranskat)abstract
- Over the last 10-20 years there has been an ever-increasing international awareness of risks to modern society from adverse and potentially harmful - and in extreme cases even disastrous - space weather events. Many individual countries and even international organisations like the United Nations (UN) have begun to increase their activities in preparing for and mitigating effects of adverse space weather. As in the rest of the world there is also in Europe an urgent need for coordination of Space Weather efforts in individual countries as well as in and among European organisations such as the European Space Agency (ESA) and the European Union (EU). This coordination should not only improve our ability to meet space weather risks, but also enable Europe to contribute to on-going global space weather efforts. While space weather is a global threat, which needs a global response, it also requires tailored regional and trans-regional responses that require coordination at all levels. Commissioned by the European Space Science Committee (ESSC) of the European Science Foundation, the authors - together with ex-officio advice from ESA and the EU - have over two years assessed European activities in the realm of space weather and formulated a set of recommendations to ESA, the EU and their respective member states, about how to prepare Europe for the increasing impact of adverse space weather effects on man-made infrastructure and our society as a whole. We have also analysed parallel international activities worldwide, and we give advice how Europe could incorporate its future activities into a global scheme.
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