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Thermal stability o...
Thermal stability of beta-Ga2O3 in mixed flows of H-2 and N-2
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- Togashi, Rie (author)
- Tokyo University of Agriculture and Technology, Japan
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- Nomura, Kazushiro (author)
- Tokyo University of Agriculture and Technology, Japan
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- Eguchi, Chihiro (author)
- Tokyo University of Agriculture and Technology, Japan
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- Fukizawa, Takahiro (author)
- Tokyo University of Agriculture and Technology, Japan
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- Goto, Ken (author)
- Tamura Corp, Japan
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- Thieu, Quang Tu (author)
- Tokyo University of Agriculture and Technology, Japan
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- Murakami, Hisashi (author)
- Tokyo University of Agriculture and Technology, Japan
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- Kumagai, Yoshinao (author)
- Tokyo University of Agriculture and Technology, Japan
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- Kuramata, Akito (author)
- Tamura Corp, Japan
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- Yamakoshi, Shigenobu (author)
- Tamura Corp, Japan
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- Monemar, Bo (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten,Tokyo University of Agriculture and Technology, Japan
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- Koukitu, Akinori (author)
- Tokyo University of Agriculture and Technology, Japan
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(creator_code:org_t)
- Japan Society of Applied Physics, 2015
- 2015
- English.
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In: Japanese Journal of Applied Physics. - : Japan Society of Applied Physics. - 0021-4922 .- 1347-4065. ; 54:4, s. 041102-
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.7...
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Abstract
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- The thermal stability of beta-Ga2O3(010) substrates was investigated at atmospheric pressure between 250 and 1450 degrees C in a flow of either N-2 or a mixture of H-2 and N-2 using a radio-frequency induction furnace. The beta-Ga2O3 surface was found to decompose at and above 1150 degrees C in N-2, while the decomposition of beta-Ga2O3 began at only 350 degrees C in the presence of H-2. Heating beta-Ga2O3 substrates in gas flows containing different molar fractions of H-2 demonstrated that the decomposition was promoted by increasing the H-2 molar fractions. Thermodynamic analysis showed that the dominant reactions are Ga2O3(s) = Ga2O(g) + O-2(g) in N-2 and Ga2O3(s) + 2H(2)(g) = Ga2O(g) = 2H(2)O(g) in a mixed flow of H-2 and N-2. The second-order reaction with respect to H-2 determined for the mixed flows agrees with the experimental results for the dependence of the beta-Ga2O3 decomposition rates on the H-2 molar fraction.
Subject headings
- NATURVETENSKAP -- Kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences (hsv//eng)
Publication and Content Type
- ref (subject category)
- art (subject category)
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- By the author/editor
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Togashi, Rie
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Nomura, Kazushir ...
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Eguchi, Chihiro
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Fukizawa, Takahi ...
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Goto, Ken
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Thieu, Quang Tu
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Murakami, Hisash ...
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Kumagai, Yoshina ...
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Kuramata, Akito
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Yamakoshi, Shige ...
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Monemar, Bo
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Koukitu, Akinori
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- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Chemical Science ...
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Japanese Journal ...
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Linköping University