| 1. |
- Khaji, Zahra, et al.
(författare)
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Investigation of the storage and release of oxygen in a Cu-Pt element of a high-temperature microcombustor
- 2014
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Ingår i: The 14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications(PowerMEMS 2014). - : Institute of Physics (IOP).
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Konferensbidrag (refereegranskat)abstract
- A miniature combustor for converting organic samples into CO2 with application in carbon isotopic measurements has been manufactured and evaluated. The combustor was made of High-Temperature Co-fired Ceramic (HTCC) alumina green tapes. The device has a built-in screen printed heater and a temperature sensor made of platinum, co-sintered with the ceramic. A copper oxide oxygen supply was added to the combustor after sintering by in-situ electroplating of copper on the heater pattern followed by thermal oxidation. Scanning Electron Microscopy (SEM), Energy Dispersive Spectroscopy (EDS) and Thermal Gravimetric Analysis (TGA) were used to study electroplating, oxidation and the oxide reduction processes. The temperature sensor was calibrated by use of a thermocouple. It demonstrates a temperature coefficient resistance of 4.66×10−3/°C between 32 and 660 °C. The heat characterization was done up to 1000 °C by using IR thermography, and the results were compared with the data from the temperature sensor. Combustion of starch confirmed the feasibility of using copper oxide as the source of oxygen of combustion.
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| 2. |
- Khaji, Zahra, et al.
(författare)
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Manufacturing and characterization of a ceramic microcombustor with integrated oxygen storage and release element
- 2015
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Ingår i: Journal of Micromechanics and Microengineering. - Bristol : Institute of Physics (IOP). - 0960-1317 .- 1361-6439. ; 25:10
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Tidskriftsartikel (refereegranskat)abstract
- A microscale ceramic high-temperature combustor with a built-in temperature sensor and source of oxygen has been designed, manufactured and characterized. The successful in situ electroplating and oxidation of copper, and the use of copper oxide as the source of oxygen were demonstrated. It was shown that residual stresses from electroplating, copper oxidation and oxide decomposition did not cause much deformation of the substrate but influenced mainly the integrity and adhesion of the metal films. The process had influence on the electrical resistances, however. Calibration of the temperature sensor and correlation with IR thermography up to 1000°C revealed a nearly linear sensor behavior. Demonstration of combustion in a vacuum chamber proved that no combustion had occurred before release of oxygen from the metal oxide resource.
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| 3. |
- Knaust, Stefan, et al.
(författare)
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Characterization of dielectric properties of polycrystalline aluminum nitride for high temperature wireless sensor nodes
- 2013
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Ingår i: Journal of Physics. - London : Institute of Physics (IOP).
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Konferensbidrag (refereegranskat)abstract
- An aluminium nitride (AlN) passive resonance circuit intended for thermallymatched high temperature wireless sensor nodes (WSN) was manufactured using thick-lmtechnology. Characterization was done for temperatures up to 900C in both a hot-chuck forfrequencies below 5 MHz, and using wireless readings of resonating circuits at 15 MHz, 59 MHz,and 116 MHz. The substrate for the circuits was sintered polycrystalline AlN. Using a simpliedmodel for the resonators where the main contribution of the frequency-shift was considered tocome from a shift of the dielectric constant for these frequencies, the temperature dependency ofthe dielectric constant for AlN was found to decrease with increasing frequency up to 15 MHz.With an observed frequency shift of 0.04% at 15 MHz, and up to 0.56% at 59 MHz over atemperature range of 900C, AlN looks as a promising material for integration of resonancecircuits directly on the substrate.
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| 4. |
- Persson, Anders, et al.
(författare)
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Optogalvanic spectroscopy with microplasma sources – Current status and development towards lab on a chip
- 2016
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Ingår i: Journal of Micromechanics and Microengineering. - : IOP Publishing. - 0960-1317 .- 1361-6439. ; 26:10
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Tidskriftsartikel (refereegranskat)abstract
- Miniaturized optogalvanic spectroscopy (OGS) shows excellent prospects of becoming ahighly sensitive method for gas analysis in micro total analysis systems. Here, a status reporton the current development of microwave induced microplasma sources for OGS is presented,together with the first comparison of the sensitivity of the method to conventional single-passabsorption spectroscopy. The studied microplasma sources are stripline split-ring resonators(SSRRs), with typical ring radii between 3.5 and 6 mm and operation frequencies around2.6 GHz. A linear response (R2 = 0.9999), and a stability of more than 100 s are demonstratedwhen using the microplasma source as an optogalvanic detector. Additionally, saturationeffects at laser powers higher than 100 mW are observed, and the temporal response of theplasma to periodic laser perturbation with repletion rates between 20 Hz and 200 Hz arestudied. Finally, the potential of integrating additional functionality with the detector isdiscussed, with the particular focus on a pressure sensor and a miniaturized combustor toallow for studies of solid samples.
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| 5. |
- Sturesson, Peter, 1981-, et al.
(författare)
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Ceramic Pressure Sensor for High Temperatures – Investigation of the Effect of Metallizationon on Read Range
- 2017
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Ingår i: IEEE Sensors Journal. - 1530-437X .- 1558-1748. ; 17:8, s. 2411-2421
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Tidskriftsartikel (refereegranskat)abstract
- A study on the relationship between circuit metallization, made by double-layer screen printing of platinum and electroplating of silver on top of platinum, and its impact on practical read range of ceramic LC resonators for high-temperature pressure measurements is presented. Also included is the first realization of membranes by draping a graphite insert with ceramic green body sheets. As a quality factor circuit reference, two-port microstrip meander devices were positively evaluated and to study interdiffusion between silver and platinum, test samples were annealed at 500 degrees C, 700 degrees C, and 900 degrees C for 4, 36, 72, and 96 h. The LC resonators were fabricated with both metallization methods, and the practical read range at room temperature was evaluated. Pressure-sensitive membranes were characterized for pressures up to 2.5 bar at room temperature, 500 degrees C and up to 900 degrees C. Samples electroplated with silver exhibited performance equal to or better than double-layer platinum samples for up to 60 h at 500 degrees C, 20 h at 700 degrees C, and for 1 h at 900 degrees C, which was correlated with the degree of interdiffusion as determined from cross-sectional analysis. The LC resonator samples with double-layer platinum exhibited a read range of 61 mm, and the samples with platinum and silver exhibited a read range of 59 mm. The lowest sheet resistance, and, thereby, the highest read range of 86 mm, was obtained with a silver electroplated LC resonator sample after 36 h of annealing at 500 degrees C.
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| 6. |
- Sturesson, Peter, et al.
(författare)
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Thermomechanical properties and performance of ceramic resonators for wireless pressure reading at high temperatures
- 2015
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Ingår i: Journal of Micromechanics and Microengineering. - Bristol : Institute of Physics Publishing (IOPP). - 0960-1317 .- 1361-6439. ; 25:9
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Tidskriftsartikel (refereegranskat)abstract
- This paper reports on the design, fabrication, and thermomechanical study of ceramic LC resonators for wireless pressure reading, verified at room temperature, at 500 °C and at 1000 °C for pressures up to 2.5 bar. Five different devices were fabricated from high-temperature co-fired ceramics (HTCC) and characterized. Alumina green tape sheets were screen printed with platinum paste, micromachined, laminated, and fired. The resulting samples were 21 mm × 19 mm with different thicknesses. An embedded communicator part was integrated with either a passive backing part or with a pressure-sensing element, including an 80 µm thick and 6 mm diameter diaphragm. The study includes measuring thermally and mechanically induced resonance frequency shifts, and thermally induced deformations. For the pressure sensor device, contributions from changes in the relative permittivity and from expanding air trapped in the cavity were extracted. The devices exhibited thermomechanical robustness during heating, regardless of the thickness of the backing. The pressure sensitivity decreased with increasing temperature from 15050 ppm bar−1 at room temperature to 2400 ppm bar−1 at 1000 °C, due to the decreasing pressure difference between the external pressure and the air pressure inside the cavity.
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| 7. |
- Sturesson, Peter, 1981-, et al.
(författare)
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Thermomechanical stability and integrability of an embedded ceramic antenna with an integrated sensor element for wireless reading in harsh environments
- 2013
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Ingår i: Journal of Physics: Conference Series. - London : IOP Publishing. - 1742-6588 .- 1742-6596.
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Konferensbidrag (refereegranskat)abstract
- This paper reports on the design, manufacturing and evaluation of a small, wirelessly powered and read resonating antenna circuit with an integrated pressure sensor. The work aims at developing miniature devices suitable for harsh environments, where high temperature prevents the use of conventional, silicon-based microdevices. Here, the device is made of alumina with platinum as conducting material. Ceramic green tapes were structured using high-precision milling, metallized using screen printing, and subsequently laminated to form stacks before they were sintered. The device's frequency shift as a function of temperature was studied up to 900°C. The contributions to the shift both from the thermomechanical deformation of the device at large, and from the integrated and, so far, self-pressurized sensor were sorted out. A total frequency shift of 3200 ppm was observed for the pressure sensor for heating over the whole range. Negligible levels of thermally induced radius of curvature were observed. With three-point bending, a frequency shift of 180 ppm was possible to induce with a curvature of radius of 220 m at a 10 N load. The results indicate that a robust pressure sensor node, which can register pressure changes of a few bars at 900°C and wirelessly transmit the signal, is viable.
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