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- Xu, Tao, et al.
(författare)
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Pillar-array based optical sensor
- 2010
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Ingår i: Optics Express. - 1094-4087. ; 18:6, s. 5420-5425
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Tidskriftsartikel (refereegranskat)abstract
- An optical microcavity based on pillar arrays has been fabricated in Si/SiO2 material system. Transmission measurement was taken and a quality factor as high as 27,600 was observed. This cavity was tested for sensing applications by immersing into optical fluids with accurate refractive indices. For refractive index change of 0.01, a resonance peak wavelength shift of 3.5 nm was measured. We also compare cavities consisting of pillars with different aspect ratios.
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