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Mems
- Ruhl, Guenther (author)
- Lemme, Max Christian (author)
- Dehe, Alfons (author)
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- Smith, Anderson (author)
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- (creator_code:org_t)
- 2015
- English.
- Patent (pop. science, debate, etc.)
Abstract
Subject headings
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- Embodiments provide a MEMS including a MEMS device and an detector circuit. The MEMS device includes a membrane, wherein a material of the membrane comprises a band gap and a crystal structure with structural elements (unit cells) connected by covalent bonds in two dimensions only. The detector circuit is configured to determine a deformation of the membrane based on a piezoresistive resistance of the material of the membrane.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
Publication and Content Type
- pop (subject category)
- pat (subject category)
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- Ruhl, Guenther
- Lemme, Max Chris ...
- Dehe, Alfons
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- Niklaus, Frank
- Smith, Anderson
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- ENGINEERING AND TECHNOLOGY
- ENGINEERING AND ...
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- By the university
- Royal Institute of Technology
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