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- Athas, W., et al.
(författare)
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AC-1: a clock-powered microprocessor
- 1997
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Ingår i: Proc of 1997 International Symposium on Low Power Electronics and Design. ; , s. 328-333
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Konferensbidrag (refereegranskat)
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- Carlsson, JRA, et al.
(författare)
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A new silicon phosphide, Si12P5 : Formation conditions, structure, and properties
- 1997
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Ingår i: Journal of Vacuum Science and Technology A. - : American Vacuum Society. - 0734-2101. ; 15:2, s. 394-401
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Tidskriftsartikel (refereegranskat)abstract
- The formation conditions, structure, and properties of the recently discovered phosphide, Si12P5 (initially assigned Si7P3), have been studied using x-ray diffraction, high-resolution transmission electron microscopy, photospectrometry, and a four-point probe. The phosphide formed in amorphous Si-P alloy thin films with 30, 35 and 44 at. % P after annealing at 1000°C for 30 min. During annealing at 1100°C, the phosphide dissociated through P evaporation. The Si12P5 phase is proposed to have rhombohedral symmetry with a P31m space group and a C5W12 structure. The hexagonal lattice parameters measured were a = 6.16±0.05 Å and c = 13.17±0.01 Å. The optical band gap and the electrical resistivity of the phosphide were determined to be 1.55 eV and 5 mΩ cm, respectively. The Gibbs free energy diagram for the Si-P system was modified to include this new Si12P5 phase.
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