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- Edner, Hans, et al.
(författare)
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Lidar measurements of atmospheric mercury
- 1990
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Ingår i: Environment and Pollution Measurement Sensors and Systems. - : SPIE. ; 1269:1, s. 73-80
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Konferensbidrag (refereegranskat)
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3. |
- Ragnarsson, Lars-Åke, 1968, et al.
(författare)
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Low temperature oxides deposited by remote plasma enhanced CVD
- 1994
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Ingår i: Proceedings of the Second International Symposium on Ultra-Clean Processing of Silicon Surfaces (UCPSS '94). ; , s. 117-
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Tidskriftsartikel (refereegranskat)abstract
- A remote plasma enhanced chemical vapor deposition (RPECVD) process was used to prepare SiO2-Si structures at ~300°C. The best midgap interface trap densities, Ditm, as obtained by C-V techniques are 6-8×1010 cm-2eV-1 for SiO2-Si(100) and 2-3×1011 cm-2eV-1 for SiO2-Si(111)
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