| 1. |
- Andersson, Kent, et al.
(författare)
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High stability titanium nitride based solar control films
- 1992
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Ingår i: Thin Solid Films. - : Elsevier. - 0040-6090 .- 1879-2731. ; 214:2, s. 213-218
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Tidskriftsartikel (refereegranskat)abstract
- Triple-layer structures of TiO2TiN/TiO2 and quadruple layer structures of TiO2Al/TiN/TiO2 have been sputtered on glass substrates at temperatures ranging from room temperature to 300°C. The reflectance and transmittance were measured in the visible and the near-IR wavelength regions. The thin layer of aluminium, in the quadruple layer, oxidizes and forms a dense diffusion barrier. The multilayers exhibit improved optical selectivity which also improves with substrate temperature up to 300°C.
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| 2. |
- Andersson, Kent, et al.
(författare)
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Zirconium nitride based transparent heat mirror coatings : preparation and characterisation
- 1994
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Ingår i: Solar Energy. - : Elsevier BV. - 0038-092X .- 1471-1257. ; 32:2, s. 199-212
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Tidskriftsartikel (refereegranskat)abstract
- Transparent heat mirror coatings based on thin zirconium nitride films have been prepared using reactive magnetron sputtering. The zirconium nitride films have been sandwiched between layers of zirconium oxide. It is shown that the multilayer configuration ZrO2/ZrN/ZrO2 can be used as solar control coatings on window glazings. A visible transmittance of around 60% and a thermal emittance lower than 0.2 can be obtained, and the ratio between visible transmittance and total solar transmittance can be as high as 1.7. The influence of substrate temperature on the optical quality of the films is evaluated and it is shown that the crystal structure of the first oxide layer is of importance for the optical quality of the nitride. The influence of preparation conditions and accelerated ageing has been modelled using the optical constants of thin films prepared under identical conditions as the films in the multilayer coatings.
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| 3. |
- Sturesson, Peter, 1981-
(författare)
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Sense, Actuate and Survive : Ceramic Microsystems for High-Temperature Aerospace Applications
- 2018
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Doktorsavhandling (övrigt vetenskapligt/konstnärligt)abstract
- In aerospace applications, but also in manufacturing, mining, energy industry and natural hazards, high temperature, corrosion, erosion and radiation, challenge the performance and being of hardware.In this work, high-temperature co-fired ceramic (HTCC) alumina and platinum have been used for a range of devices intended for aerospace applications at up to 1000°C.The thermomechanics of a pressure sensor was investigated, and the interfacing was attained by wireless powering and reading. However, read range was limited and sensitivity decreased with temperature. Silver, electroplated after sintering, was found to remedy this until it eventually alloyed with platinum.Copper was electroplated and oxidized for oxygen storage in a microcombustor, intended for sample preparation for optogalvanic spectroscopy (OGS) to indicate extraterrestrial life. Despite delamination, caused by residual stresses, the device operated successfully.Conversely, pre-firing metallization by integration of platinum wires was studied. Freely suspended, and despite heat-induced shape irregularities, these were found advantageous over screen printed elements for gas heating, and temperature and pressure sensing. By fusing off the wires, spherical tips, allowing for impedance monitoring of microplasma sources in, e.g., OGS, were formed.Microplasma sources can also be used for gas heating. This, together with screen printed and suspended resistive heaters, was evaluated in a microthruster, showing that plasma heating is the most effective, implying fuel consumption reduction in satellite propulsion.In conclusion, HTCC alumina microdevices are thermally stable and could benefit several aerospace applications, especially with the complementary metallization schemes devised here.Future developments are expected to include both processing and design, all with the intention of sensing, actuating and surviving in high-temperature environments.
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| 4. |
- Veszelei, Monica, et al.
(författare)
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Optical characterization of sputtered semitransparent zirconium nitride films
- 1993
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Ingår i: Optical materials (Amsterdam). - 0925-3467 .- 1873-1252. ; 2:4, s. 257-266
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Tidskriftsartikel (refereegranskat)abstract
- Thin semi-transparent ZrN films have been prepared using reactive dc magnetron sputtering. The films had thickness from 11 to 43 nm and were grown on heated and room temperature glass substrates. The optical constants, N=n+ik, of the thin films have been determined with an RT inversion method in the wavelength interval 0.40 to 2.0 μm. The thickness of the films was determined from the photometric measurements. The optical properties of the thin films on glass were compared to opaque and thin ZrN films grown on single crystalline Si. The Drude parameters were calculated from the measured optical constants in the relaxation region of the thin films. The relaxation time, τ, of the thin films was found to increase with film thickness, substrate temperature and substrate crystallinity. The relaxation time is the mean free time for the electrons between collisions and a long relaxation time corresponds to a film with high optical quality. The observed decrease of τ with decreasing film thickness can be explained by the higher statistical probability of the electrons in a thin film to collide with the two surfaces of the film. Another explanation to the decrease of τ with film thickness is scattering from grain boundaries and lattice impurities. The higher optical quality of films grown on heated substrates is probably due to an increased grain size. The measured optical constants were compared with calculated optical constants, using the Drude model, and the optical behaviour of thin ZrN films was found to be well described by the screened free-electron model.
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| 5. |
- Veszelei, Monica, et al.
(författare)
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Optical constants and Drude analysis of sputtered zirconium nitride films
- 1994
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Ingår i: Applied Optics. - 0003-6935 .- 1539-4522. ; 33:10, s. 1993-2001
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Tidskriftsartikel (refereegranskat)abstract
- Opaque and semitransparent dc magnetron-sputtered ZrN films on glass and silicon have been optically characterized with spectral reflectance measurements and ellipsometry. High rate sputtered ZrN has good optical selectivity, i.e., higher than 90% infrared reflectance and a pronounced reflectance step in the visible to a reflectance minimum of less than 10% at 350 nm. The results are comparable with those obtained for single crystalline samples and those prepared by chemical vapor deposition. The complex optical constant (N = n v ik) for opaque films has been determined in the 0.23-25-µm wavelength range with Kramers-Kronig integration of bulk reflectance combined with oblique incidence reflectance for p-polarized light. A variable angle of incidence spectroscopic ellipsometer has been used for determination of the optical constants in the 0.28-1.0-µm wavelength region. The results of the two methods show excellent agreement. The results indicate that ZrN is free electronlike and the Drude model can be applied. The best opaque films had Drude plasma energies (ħω(p) between 6.6 and 7.5 eV and relaxation energies (ħ/τ) between 0.29 and 0.36 eV. Ellipsometer data for the semitransparent films show that the refractive index (n) in the visible increases with decreasing film thickness whereas the extinction coefficient (k) is essentially unchanged. The optical properties are improved by deposition upon a heated substrate.
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| 6. |
- Khaji, Zahra, et al.
(författare)
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Investigation of the storage and release of oxygen in a Cu-Pt element of a high-temperature microcombustor
- 2014
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Ingår i: The 14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications(PowerMEMS 2014). - : Institute of Physics (IOP).
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Konferensbidrag (refereegranskat)abstract
- A miniature combustor for converting organic samples into CO2 with application in carbon isotopic measurements has been manufactured and evaluated. The combustor was made of High-Temperature Co-fired Ceramic (HTCC) alumina green tapes. The device has a built-in screen printed heater and a temperature sensor made of platinum, co-sintered with the ceramic. A copper oxide oxygen supply was added to the combustor after sintering by in-situ electroplating of copper on the heater pattern followed by thermal oxidation. Scanning Electron Microscopy (SEM), Energy Dispersive Spectroscopy (EDS) and Thermal Gravimetric Analysis (TGA) were used to study electroplating, oxidation and the oxide reduction processes. The temperature sensor was calibrated by use of a thermocouple. It demonstrates a temperature coefficient resistance of 4.66×10−3/°C between 32 and 660 °C. The heat characterization was done up to 1000 °C by using IR thermography, and the results were compared with the data from the temperature sensor. Combustion of starch confirmed the feasibility of using copper oxide as the source of oxygen of combustion.
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| 7. |
- Sturesson, Peter, 1981-, et al.
(författare)
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Pirani Microgauge Fabricated of High-Temperature Co-fired Ceramics with Integrated Platinum Wires
- 2019
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Ingår i: Sensors and Actuators A-Physical. - : Elsevier BV. - 0924-4247 .- 1873-3069. ; 285, s. 8-16
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Tidskriftsartikel (refereegranskat)abstract
- This paper presents the integration and pressure sensor operation of platinum bond wires in High-Temperature Co-fired alumina (HTCC). Devices were fabricated with a 50 μm diameter wire suspended across a 500 μm wide cavity in green-body state HTCC, electrically connected to screen printed alumina conductors. The substrate shrinkage during sintering to a cavity width of 400 μm causes the wire element to elevate from the cavity´s bottom surface. Resulting devices were compared with reference devices, containing screen-printed sensor elements, as Pirani gauges operated at 100 °C in constant-resistance mode, and in dynamic mode with a feeding current of 1 A in a pressure range from 10−4 Torr to atmospheric pressure. Also, devices with wire lengths between 500 and 3500 μm were operated and studied in constant-resistance and dynamic mode. Lastly, a device is demonstrated in operation at a mean temperature of 830 °C. The results include wire elements with a consistent elevation from their substrate surfaces, with irregularities along the wires. The wire devices exhibit a faster pressure response in dynamic mode than the reference devices do but operate similarly in constant-resistance mode. Increasing the wire element length shows an increasing dynamic pressure range but a decreasing maximum sensitivity. The sensitivity is retained in high temperature mode, but the dynamic range is extended from about 10 Torr to about 700 Torr.
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| 8. |
- Sturesson, Peter, 1981-, et al.
(författare)
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Thermomechanical stability and integrability of an embedded ceramic antenna with an integrated sensor element for wireless reading in harsh environments
- 2013
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Ingår i: Journal of Physics: Conference Series. - London : IOP Publishing. - 1742-6588 .- 1742-6596.
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Konferensbidrag (refereegranskat)abstract
- This paper reports on the design, manufacturing and evaluation of a small, wirelessly powered and read resonating antenna circuit with an integrated pressure sensor. The work aims at developing miniature devices suitable for harsh environments, where high temperature prevents the use of conventional, silicon-based microdevices. Here, the device is made of alumina with platinum as conducting material. Ceramic green tapes were structured using high-precision milling, metallized using screen printing, and subsequently laminated to form stacks before they were sintered. The device's frequency shift as a function of temperature was studied up to 900°C. The contributions to the shift both from the thermomechanical deformation of the device at large, and from the integrated and, so far, self-pressurized sensor were sorted out. A total frequency shift of 3200 ppm was observed for the pressure sensor for heating over the whole range. Negligible levels of thermally induced radius of curvature were observed. With three-point bending, a frequency shift of 180 ppm was possible to induce with a curvature of radius of 220 m at a 10 N load. The results indicate that a robust pressure sensor node, which can register pressure changes of a few bars at 900°C and wirelessly transmit the signal, is viable.
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