Effect of nitrogen pressure on mechanical properties of nc-TiAlN/a-Si3N4 nanocomposite coatings deposited by cathodic arc PVD process

• The present work investigates effect of nitrogen pressure on composition and mechanical properties of superhard nc-TiAlN/a-Si3N4 nanocomposite coatings deposited by cathodic arc PVD process. As the nitrogen pressure increases, at.% ratio of (Al+Si)/Ti, initially, increases to a maximum and thereafter, it decreases while the nitrogen content follows the reverse trend. Hardness is influenced by chemical composition and crystallite size of TiAlN phase. Maximum average hardness of 37 GPa is achieved when at.% ratio of Al(+Si)/Ti or N/(Ti+Al+Si) approaches 1.0 and decrease in scratch adhesion strength is attributed to the defects caused by nitrogen deficiency.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Materialteknik -- Bearbetnings-, yt- och fogningsteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Materials Engineering -- Manufacturing, Surface and Joining Technology (hsv//eng)

Nyckelord

Nanocomposite

TiAlSiN

nc-TiAlN/a-Si3N4

Nitrogen pressure

Cathodic arc PVD

Cylindrical cathode

Production Technology

Produktionsteknik

Manufacturing and materials engineering

Produktions- och materialteknik

Publikations- och innehållstyp

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