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Creation of Pattern...
Creation of Patterned Gold Nanostructures via Electron-Beam-Induced Deposition
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- Riazanova, Anastasia (författare)
- KTH,Teknisk materialfysik
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- Mulders, Johannes J. L. (författare)
- FEI Electron Optics
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- Belova, Lyubov M. (författare)
- KTH,Teknisk materialfysik
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(creator_code:org_t)
- 2013-05-15
- 2013
- Engelska.
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Ingår i: Materials Research Society Symposium Proceedings. - : Springer Science and Business Media LLC. - 0272-9172 .- 1946-4274. ; 1546
- Relaterad länk:
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http://www.mrs.org/o...
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visa fler...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- One of the methods to grow nanoscale three-dimensional (3D) Au patterns is to perform local electron-beam-induced deposition (EBID) using the Me2Au(acac) precursor inside the chamber of a scanning electron microscope (SEM). However, due to the organometallic nature of the chemical, the concentration of the metallic constituent in the as-deposited structure is dramatically low, at around 10 at. % of Au. Ex-situ post-annealing of Me2Au(acac) EBIDs is a very promising purification approach, resulting in an Au content of > 92 at. % after annealing at 600 °C. However, in most of the cases it also distorts the geometrical shape of the heat-treated structure, preserving of which is essential for the application. In this paper we present a systematic study of the dependence between the annealing parameters and resulting purity in combination with the shape of the Au structure. Optimized heat treatment conditions for the creation of well-purified high aspect ratio Au pillar array are presented; and for planar continuous structures, the importance of the parameter height to area ratio is identified.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Annan materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Other Materials Engineering (hsv//eng)
Nyckelord
- EBID
- nanoprototyping
- Au
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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