On the role of metastables in capacitively coupled oxygen discharges

• The roles of the metastable atoms O(D-1) and molecules O-2(a(1)Delta(g)) in a capacitively coupled rf driven oxygen discharge at 50 mTorr are explored using the one-dimensional object- oriented PIC/MCC code oopd1, which has one spatial dimension and three velocity components. The oxygen discharge model considers the species O2(X3 Sigma g-), O-2(a(1)Delta(g)) O(P-3), O(D-1), O-2(+), O+, O-, and electrons. The particle density profiles, the electron heating rate profile, the electron energy probability function and the ion energy distribution function at the grounded electrode are explored, including and/or excluding the metastables and secondary electron emission. We find that detachment by the metastable molecule O-2(a(1)Delta(g)) has a significant influence on the discharge properties such as the electronegativity, the effective electron temperature and the electron heating processes.

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NATURVETENSKAP  -- Kemi (hsv//swe)

NATURAL SCIENCES  -- Chemical Sciences (hsv//eng)

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