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Optical Quality Imp...
Optical Quality Improvement of Si Photonic Devices Fabricated by Focused-Ion-Beam Milling
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- Tian, Jie (författare)
- KTH,Mikroelektronik och tillämpad fysik, MAP
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Yan, Wei (författare)
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Liu, Yazhao (författare)
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- Luo, Jun (författare)
- KTH,Mikroelektronik och tillämpad fysik, MAP
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Zhang, Daozhong (författare)
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Li, Zhiyuan (författare)
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- Qiu, Min (författare)
- KTH,Mikroelektronik och tillämpad fysik, MAP
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(creator_code:org_t)
- 2009
- 2009
- Engelska.
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Ingår i: Journal of Lightwave Technology. - 0733-8724 .- 1558-2213. ; 27:19, s. 4306-4310
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Focused-ion-beam directly milling strategy was used to fabricate photonic resonators on crystalline silicon-on-insulator substrate. In order to reduce damages such as implanting ions, amorphous layers and re-deposition process which are induced by the ions, a sacrificed silica layer was used as an etching mask and a silicon thermal oxidation process was performed. The transmission spectra of both photonic crystal cavities and micro-ring resonators were measured. The resulting data demonstrate that the Q factors are significantly improved after the oxidation treatment.
Nyckelord
- Focused-ion-beam
- micro-ring resonator
- photonic crystals
- silicon
- thermal oxidation
- crystal slabs
- wave-guides
- microring resonator
- silicon chip
- transmission
- technology
- nanocavity
- filters
- damage
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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