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Fabrication and cha...
Fabrication and characterization of diffractive optical elements in InP for monolithic integration with surface-emitting components
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Vukusic, J. (författare)
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Bengtsson, J. (författare)
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Ghisoni, M. (författare)
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Larsson, A. (författare)
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Carlstrom, C. F. (författare)
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- Landgren, Gunnar. (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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(creator_code:org_t)
- 2000
- 2000
- Engelska.
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Ingår i: Applied Optics. - 1559-128X .- 2155-3165. ; 39:3, s. 398-401
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- We report on the fabrication and subsequent characterization of binary diffractive optical elements (DOE's) in InP for operation at 1.3 mu m. Fresnel lenses of different focal, lengths and a DOE that splits and focuses an incident beam into a 1 x 4 array of spots (optical fan-out) were fabricated. We realized the surface reliefs by patterning resist, using electron-beam lithography and etching with a chemically assisted ion beam, which produced well-defined patterns with smooth sidewalls and little if no surface roughness. The measured efficiency for the lenses was 36%. For the fan-out element the efficiency and the uniformity error were 26% and 30%, respectively. Spot sizes small as 16 mu m were measured.
Nyckelord
- laser arrays
- kinoform
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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