Sökning: id:"swepub:oai:DiVA.org:kth-20410" >
Fabrication and cha...
Fabrication and characterization of heterojunction diodes with HVPE-Grown GaN on 4H-SiC
-
Danielsson, E. (författare)
-
- Zetterling, Carl-Mikael (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
-
- Östling, Mikael (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
-
visa fler...
-
Nikolaev, A. (författare)
-
Nikitina, I. P. (författare)
-
Dmitriev, V. (författare)
-
visa färre...
-
(creator_code:org_t)
- Institute of Electrical and Electronics Engineers (IEEE), 2001
- 2001
- Engelska.
-
Ingår i: IEEE Transactions on Electron Devices. - : Institute of Electrical and Electronics Engineers (IEEE). - 0018-9383 .- 1557-9646. ; 48:3, s. 444-449
- Relaterad länk:
-
https://urn.kb.se/re...
-
visa fler...
-
https://doi.org/10.1...
-
visa färre...
Abstract
Ämnesord
Stäng
- GaN/SiC heterojunctions can improve the performance considerably for BJTs and FETs. In this work, heterojunction diodes have been manufactured and characterized. The fabricated diodes have a GaN n-type cathode region on top of a JH-SIC p-type epi layer. The GaN layer was grown with HVPE directly on off-axis SiC without a buffer layer. Mesa structures were formed and a Ti metallization was used as cathode contact to GaN, and the anode contact was deposited on the backside using sputtered Al. Both current-voltage (I-V) and capacitance-voltage (C-V) measurements were performed on the diode structures. The ideality factor of the measured diodes was 1.1 and was constant with temperature. A built in potential of 2.06 V was extracted from I-V-measurements and agrees well with the built in potential from C-V-measurements. The conduction band offset was extracted to 1.1 eV and the heterojunction was of type II. The turn on voltage for the diodes is about 1 V lower than expected and a suggested mechanism for this effect is discussed.
Nyckelord
- gallium nitride
- HVPE
- semiconductor heterojunctions
- silicon carbide
- contact
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
Hitta via bibliotek
Till lärosätets databas