Systematic Optimization of Boron Diffusion for Solar Cell Emitters

• To achieve p-n junctions for n-type solar cells, we have studied BBr3 diffusion in an open tube furnace, varying parameters of the BBr3 diffusion process such as temperature, gas flows, and duration of individual process steps, i.e., predeposition and drive-in. Then, output parameters such as carrier lifetime, sheet resistance, and diffusion profile were measured and statistically analyzed to optimize the emitter characteristics. Statistical analysis (factorial design) was finally employed to systematically explore the effects of the set of input variables on the outputs. The effect of the interactions between inputs was also evaluated for each output, quantified using a two-level factorial method. Temperature and BBr3 flow were found to have the most significant effect on different outputs such as carrier lifetime, junction depth, sheet resistance, and final surface concentration.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

Silicon solar cells

boron diffusion

sheet resistance

lifetime

junction depth

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)