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Growth and characte...
Growth and characterization of Na0.5K0.5NbO3 thin films on polycrystalline Pt80Ir20 substrates
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- Wang, Xiangjun (författare)
- Linköpings universitet,Tekniska högskolan,Biomolekylär och Organisk Elektronik
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Olafsson, S. (författare)
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- Madsen, L. D. (författare)
- Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden Swedish Def Res Agcy, FOI, SE-58111 Linkoping, Sweden Royal Inst Technol, Dept Condensed Matter Phys, SE-16440 Stockholm, Sweden
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Rudner, S. (författare)
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Ivanov, I. P. (författare)
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- Grishin, Alexander M. (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT,Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden Swedish Def Res Agcy, FOI, SE-58111 Linkoping, Sweden Royal Inst Technol, Dept Condensed Matter Phys, SE-16440 Stockholm, Sweden
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- Helmersson, Ulf (författare)
- Linköpings universitet,Tekniska högskolan,Plasma och ytbeläggningsfysik
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- Ivanov, Ivan Gueorguiev (författare)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
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(creator_code:org_t)
- 2002
- 2002
- Engelska.
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Ingår i: Journal of Materials Research. - 0884-2914 .- 2044-5326. ; 17:5, s. 1183-1191
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- Na0.5K0.5NbO3 thin films have been deposited onto textured polycrystalline Pt80Ir20 substrates using radio frequency magnetron sputtering. Films were grown in off- and on-axis positions relative to the target at growth temperatures of 500-700 degreesC and sputtering pressures of 1-7 Pa. The deposited films were found to be textured, displaying a mixture of two orientations (001) and (101). Films grown on-axis showed a prefered (001) orientation, while the off-axis films had a (101) orientation. Scanning electron microscopy showed that the morphology of the films was dependent on the substrate position and sputtering pressure. The low-frequency (10 kHz) dielectric constants of the films were found to be in the range of approximately 490-590. Hydrostatic piezoelectric measurements showed that the films were piezoelectric in the as-deposited form with a constant up to 14.5 pC/N.
Nyckelord
- sputter-deposition
- epitaxial-growth
- mgo
- TECHNOLOGY
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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