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Damage evolution an...
Damage evolution and recovery on both Si and C sublattices in Al-implanted 4H-SiC studied by Rutherford backscattering spectroscopy and nuclear reaction analysis
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Zhang, Y. (författare)
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Weber, W. J. (författare)
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Jiang, W. (författare)
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- Hallén, Anders. (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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Possnert, G. (författare)
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(creator_code:org_t)
- AIP Publishing, 2002
- 2002
- Engelska.
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Ingår i: Journal of Applied Physics. - : AIP Publishing. - 0021-8979 .- 1089-7550. ; 91:10, s. 6388-6395
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Damage evolution and subsequent recovery in 4H-SiC epitaxial layers irradiated with 1.1 MeV Al-2(2+) molecular ions at 150 K to ion fluences from 1.5x10(13) to 2.25x10(14) Al cm(-2) were studied by Rutherford backscattering spectroscopy (RBS) and C-12(d,p)C-13 nuclear reaction analysis (NRA) using a 0.94 MeV deuterium (D+) beam in channeling geometry. Disorder on both the Si and C sublattices was measured simultaneously from the RBS scattering and NRA reaction yields. The relative disorder on both sublattices follows a nonlinear dependence on ion fluence that is consistent with a model based on simple defect accumulation and a direct-impact, defect-stimulated process for amorphization. At low ion fluences, the relative disorder on the C sublattice is higher than that on the Si sublattice. Isochronal annealing up to 870 K revealed the existence of three distinct recovery stages at similar to350, 520, and 650 K for low to intermediate damage levels. In highly damaged samples, where a buried amorphous layer is produced, the onset of a fourth recovery stage appears above 800 K. Similar recovery behaviors on both the Si and C sublattices suggests some coupling of recovery processes for Si and C defects.
Nyckelord
- silicon-carbide
- induced amorphization
- au recoils
- irradiation
- accumulation
- simulation
- disorder
- ceramics
- crystals
- defects
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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