Quantitative x-ray photoelectron spectroscopy study of Al/AlOx bilayers

• An x-ray photoelectron spectroscopy (XPS) analysis of Nb/Al wedge bilayers, oxidized by both plasma and natural oxidation, is reported. The main goal is to show that the oxidation state-i.e., O:(oxidize)Al ratio-, structure and thickness of the surface oxide layer, as well as the thickness of the metallic Al leftover, as functions of the oxidation procedure, can be quantitatively evaluated from the XPS spectra. This is relevant to the detailed characterization of the insulating barriers in (magnetic) tunnel junctions.

Nyckelord

magnetic tunnel-junctions

light assisted oxidation

ballistic magnetoresistance

thermal-stability

room-temperature

ion-beam

interface

barriers

nanocontacts

quality

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)