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The role of surface...
The role of surface quenching of the singlet delta molecule in a capacitively coupled oxygen discharge
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- Proto, A. (författare)
- Univ Iceland, Sci Inst, Dunhaga 3, IS-107 Reykjavik, Iceland.
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- Gudmundsson, Jon Tomas, 1965- (författare)
- KTH,Rymd- och plasmafysik,Univ Iceland, Sci Inst, Dunhaga 3, IS-107 Reykjavik, Iceland
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Univ Iceland, Sci Inst, Dunhaga 3, IS-107 Reykjavik, Iceland Rymd- och plasmafysik (creator_code:org_t)
- 2018-07-10
- 2018
- Engelska.
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Ingår i: Plasma sources science & technology. - : Institute of Physics Publishing (IOPP). - 0963-0252 .- 1361-6595. ; 27:7
- Relaterad länk:
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http://arxiv.org/pdf...
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visa fler...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- We use the one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 to explore the influence of the surface quenching of the singlet delta metastable molecule O-2(a(1)Delta(g)) on the electron heating mechanism, and the electron energy probability function (EEPF), in a single frequency capacitively coupled oxygen discharge. When operating at low pressure (10 mTorr) varying the surface quenching coefficient in the range 0.000 01-0.1 has no influence on the electron heating mechanism and electron heating is dominated by drift-ambipolar (DA) heating in the plasma bulk and electron cooling is observed in the sheath regions. As the pressure is increased to 25 mTorr the electron heating becomes a combination of DA-mode and alpha-mode heating, and the role of the DA-mode decreases with decreasing surface quenching coefficient. At 50 mTorr, electron heating in the sheath region dominates. However, for the highest quenching coefficient there is some contribution from the DA-mode in the plasma bulk, but this contribution decreases to almost zero and pure alpha-mode electron heating is observed for a surface quenching coefficient of 0.001 or smaller.
Ämnesord
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Nyckelord
- oxygen discharge
- particle-in-cell
- surface quenching
- electron heating mechanism
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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