Small footprint knife gate microvalves for large flow control

• This paper introduces the first area-optimized micromachined knife gate microvalve. In comparison to recent microvalves the pressure-flow performance is increased using out-of-plane actuators and an out-of-plane orifice. Three different actuator-gate designs and their fabrication are described. The valve features integrated therinal silicon/aluminum bimorph actuators where the aluminum layer forins the resistive heater as well as the bimorph material. The characterization of the actuators and of the pressure-flow perfon-nance is presented. The valve allows a flow change of Delta Q=3.4 1/min at 100 kPa on an active chip area of only 2.3 x 3.7 mm(2).

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

microvalves

micropneumatics

microfluidics

Electrical engineering, electronics and photonics

Elektroteknik, elektronik och fotonik

Publikations- och innehållstyp

ref (ämneskategori)

kon (ämneskategori)