High-resolution X-ray photoemission spectroscopy study of AlN nano-columns grown by nitridation of Al nano-squares on Si(111) substrates with ammonia

• The growth of AlN nano-columns by ammonium nitridation of Al nano-squares embedded in SiO2 on Si(111) substrates was studied by high-resolution X-ray photoemission spectroscopy from a synchrotron radiation source and scanning electron microscopy (SEM). Selective nitridation of the Al nano-squares on the SiO2 mask was obtained in the temperature window of 600 degrees C-700 degrees C. The well-shaped AlN nano-column arrays with diameters confined by the lateral size of the Al nano-squares (similar to 100 nm) were observed in SEM.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Materialteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Materials Engineering (hsv//eng)

Nyckelord

Nitridation

Nano-structures

Aluminum nitride

X-ray photoemission spectroscopy

Ammonium

Materials science

Teknisk materialvetenskap

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)