Inkjet printing, laser-based micromachining, and micro-3D printing technologies for MEMS

• A number of unconventional micromachining technologies are emerging that are of potential interest for microelectromechanical systems (MEMS) manufacturing. Such micromachining processes include sequential processes in which devices on a substrate are formed one at a time, which is in contrast to conventional parallel semiconductor manufacturing processes. Nevertheless, many of the serial micromachining processes, including inkjet printing technologies and laser-based processes can be highly efficient and cost competitive, especially for low- and medium-sized manufacturing volumes as well as for prototyping purposes. The technologies presented in this chapter can be categorized as additive micromachining approaches (e.g., inkjet printing) and subtractive micromachining approaches (e.g., laser ablation). This chapter discusses the more mature technologies that are already being developed in a commercial context and a number of new and emerging micromachining approaches that are still in the early research and development stage. 

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Annan teknik -- Mediateknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies -- Media Engineering (hsv//eng)

Nyckelord

Etching

Focused ion beam milling and e-beam-assisted deposition

Inkjet printing

Laser ablation

Laser writing

Micro-laser sintering

Micromachining

Microstereolithography

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