A vacuum-sealed silicon photonic MEMS tunable ring resonator with independent control over coupling and phase

• Ring resonators are a vital element for designing filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption and good optical performance are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of coupling and round-trip phase using low-power microelectromechanical (MEMS) actuation. The MEMS rings are individually vacuum-sealed on wafer scale, enabling reliable long-term operation with low damping. On resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4V and a peak drive amplitude as low as 20mV.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

Silicon photonics

photonic MEMS

programmable photonics

telecommunications

ring filter

Publikations- och innehållstyp

vet (ämneskategori)

ovr (ämneskategori)