A Resonant Graphene NEMS Vibrometer

• Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker. 

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Maskinteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Mechanical Engineering (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Annan teknik -- Övrig annan teknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies -- Other Engineering and Technologies not elsewhere specified (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Kemiteknik -- Annan kemiteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Chemical Engineering -- Other Chemical Engineering (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

graphene

laser doppler vibrometry

nano-electromechanical (NEMS)

resonators

vibration

Laser Doppler velocimeters

NEMS

Vibration measurement

Building structural

Nano-electromechanical

Performance

Safety stability

Structural safety

Vibration sensors

Vibrometers

Internet of things

graphite

silicon

chemistry

equipment design

microelectromechanical system

Micro-Electrical-Mechanical Systems

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