High Sensitive Gas Sensor Application Based on a Small Defect in Silicon Waveguide

• A small defect in silicon nanowire waveguides is applied for gas sensors. Small defects with some special shapes and indexes can produce strong resonances with the incident light and induce large loss. Since the silicon waveguide has air cladding, the position of resonant peaks will be sensitive for the variation of the ambient air composition. The sensor based on the principle has a high sensitivity. As an example, we monitored the change of the position of the resonance peak as a function of alcohol concentrations in air. Results showed that a similar to 5-mg/L ethanol vapor in the air can result in a similar to 20-nm wavelength shift of the resonance.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

Gas sensor

integrated optics

planar waveguides

waveguide deposition

Electrical engineering, electronics and photonics

Elektroteknik, elektronik och fotonik

Publikations- och innehållstyp

ref (ämneskategori)

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