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Formation of pn jun...
Formation of pn junctions in deep silicon pores for X-ray imaging detector applications
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- Badel, Xavier (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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- Linnros, Jan (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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- Janson, M. S. (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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- Österman, J. (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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(creator_code:org_t)
- 2003
- 2003
- Engelska.
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Ingår i: Nuclear Instruments and Methods in Physics Research Section A. - 0168-9002 .- 1872-9576. ; 509:1-3, s. 96-101
- Relaterad länk:
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http://www.sciencedi...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- The formation of pn junctions in deep silicon pores has been studied for a new concept of X-ray imaging detectors. The sensitive part of the device is an array of CsI(Tl) columns formed by filling a silicon matrix of pores having pn junctions in their walls. Under X-ray illumination, the CsI(TI) scintillator emits photons that are collected by the pn junctions. Relatively high signal collection efficiency is expected. However, the formation of pn junctions inside pore walls represents a challenging step in the detector fabrication. In this work pore matrices were fabricated in n-type silicon by deep reactive ion etching and by photo-electrochemical etching. The pn junctions were formed either by boron diffusion or deposition of boron doped poly-silicon. Various techniques were used to analyze the transverse depth profiles of boron atoms at different pore depths. The study shows successful results for pn-junctions formed both by diffusion and by poly-silicon deposition.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- pn junction
- SCM
- SEM
- Silicon macropores
- SIMS
- SSRM
- Photons
- Porosity
- Semiconductor junctions
- X rays
- X-ray imaging detectors
- Radiation detectors
- Electrophysics
- Elektrofysik
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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