Sökning: id:"swepub:oai:DiVA.org:kth-73336" >
Compact X-ray micro...
Compact X-ray microscopes for EUV- and soft X-radiation with spectral imaging capabilities
-
Schaefer, D. (författare)
-
Nisius, T. (författare)
-
Frueke, R. (författare)
-
visa fler...
-
Rausch, S. (författare)
-
Wieland, M. (författare)
-
- Vogt, Ulrich (författare)
- KTH,Biomedicinsk fysik och röntgenfysik
-
Wilhein, T. (författare)
-
visa färre...
-
(creator_code:org_t)
- SPIE, 2006
- 2006
- Engelska.
-
Ingår i: Advances in X-Ray/EUV Optics, Components, and Applications. - : SPIE. - 0819463965 ; , s. 31704-31704
- Relaterad länk:
-
https://urn.kb.se/re...
-
visa fler...
-
https://doi.org/10.1...
-
visa färre...
Abstract
Ämnesord
Stäng
- We report on a compact full-field transmission microscope (CTXM) and a scanning transmission microscope (CST'XM) developed for imaging at laboratory scale X-ray sources. The microscopes are based on zone plates for imaging in the EUV and water window region (wavelength 2.3 nm to 4.4 mn). The radiation for the full-field microscope is generated by focusing short laser pulses with an energy of 100 mJ on a 20 gm cryogenic liquid nitrogen jet. A condenser zone plate in conjunction with an aperture is used to provide monochromatic sample illumination. This allows for easy wavelength selection within the N-2,-Emission spectrum. Thus, the presented setup offers the possibility of spectral imaging. A micro zone plate generates a magnified image detected by a back illuminated TE-cooled CCD camera (1,340 x 1,300 pixel). The actual configuration provides magnifications up to 1,000x at exposure times in a range of a few ten minutes with sub-100 nm resolution. Our compact scanning microscope (CSTXM) operates with a zone plate, focusing the radiation onto a sample which is placed on a piezo driven xy-stage with 1 nm lateral resolution. Using high-harmonic radiation at 13 nm wavelength sub-micron resolution is achieved. With light at 17 nm wavelength originating from the O-VI emission line of a laser plasma source based on an ethanol jet, 500 nm structures were imaged in less than 20 minutes resulting in an 100 x 40 pixel image.
Ämnesord
- NATURVETENSKAP -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)
Nyckelord
- full-field X-ray microscopy
- scanning X-ray microscopy
- zone plate
- laser plasma source
Publikations- och innehållstyp
- ref (ämneskategori)
- kon (ämneskategori)
Hitta via bibliotek
Till lärosätets databas