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Hole mobility in ul...
Hole mobility in ultrathin body SOI pMOSFETs with SiGe or SiGeC channels
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- Hållstedt, Julius (author)
- KTH,Mikroelektronik och tillämpad fysik, MAP
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- von Haartman, Martin (author)
- KTH,Mikroelektronik och Informationsteknik, IMIT
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- Hellström, Per-Erik (author)
- KTH,Integrerade komponenter och kretsar
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- Östling, Mikael (author)
- KTH,Integrerade komponenter och kretsar
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- Radamson, Henry (author)
- KTH,Integrerade komponenter och kretsar
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(creator_code:org_t)
- 2006
- 2006
- English.
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In: IEEE Electron Device Letters. - 0741-3106 .- 1558-0563. ; 27:6, s. 466-468
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http://ieeexplore.ie...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
Close
- The hole mobilities of SiGe and SiGeC channel pMOSFETs fabricated on ultrathin silicon-on-insulator substrates are investigated and compared with reference Si channel devices. The total thickness of the fully depleted Si/SiGe(C)/Si body structure is similar to 25 nm. All devices demonstrated a near ideal subthreshold behavior, and the drive current and mobility were increased with more than 60% for SiGe and SiGeC channels. When comparing SIMOX and UNIBOND substrates, no significant difference could be detected.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- Fully depleted (FD); Heterostructure; Mobility; MOSFETs; SiGe; SiGeC; Silicon-on-insulator (SOI) technology
- Semiconductor physics
- Halvledarfysik
Publication and Content Type
- ref (subject category)
- art (subject category)
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