Heteroepitaxy of InP on Silicon-on-Insulator for Optoelectronic Integration

• Epitaxial lateral overgrowth of InP was performed on patterned silicon-on-insulator (SOI) and compared with that on Si substrates in a low pressure hydride vapor phase epitaxy system. The InP was characterized by cathodoluminescence. No red shift of peak wavelength was detected for InP/SOI indicating a negligible thermal strain. Additional low energy peaks were found in some regions with a granular structure on the SOI template. A subsequent growth of an InGaAsP/InP MQW (multi quantum well) structure (λ∼1.5 μm) was grown on the SOI template and on a planar InP reference sample by metal-organic phase epitaxy. The MQW was characterized by room temperature photoluminescence. A red shift of 35 nm with respect to the reference sample was attributed to the selective-area effect causing thicker wells and/or an increased indium content. Although the PL intensity was weaker than that obtained for the reference, the FWHMs were comparable.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

area effect

Electrochemical Society (ECS)

Epitaxial lateral overgrowth (ELOG)

Granular structures

Hetero-epitaxy

Hydride vapor-phase epitaxy (HVPE)

indium content

InGaAsP/InP

Low pressure (LP)

Low-energy peaks

Metal organic (MO)

Multi quantum well (MQW)

on Patterned Silicon (GPS)

Optoelectronic integrations

Peak wavelengths

Photoluminescence (PL) intensity

red shifting

Room Temperature Photoluminescence (RT-PL)

Si(2 1 1) substrates

Silicon on insulator (SOI)

Astrophysics

Blood vessel prostheses

Computer networks

Crystal growth

Doppler effect

Epitaxial growth

Light emission

Luminescence

Microsensors

Molecular beam epitaxy

Nonmetals

Optical sensors

Photonics

Semiconductor quantum wells

Silicon

Electrical engineering, electronics and photonics

Elektroteknik, elektronik och fotonik

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)