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Quantitative Study ...
Quantitative Study on the Role of Supersaturation during Sublimation Growth on the Yield of 50 mm diameter 3C-SiC
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- Rankl, Dominik (författare)
- Crystal Growth Lab, University of Erlangen
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- Jokubavicius, Valdas (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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- Syväjärvi, Mikael (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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- Wellmann, Peter (författare)
- Crystal Growth Lab, University of Erlangen
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(creator_code:org_t)
- 2015
- 2015
- Engelska.
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Ingår i: Materials Science Forum. - 0255-5476 .- 1662-9752. ; 821, s. 77-80
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.4...
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Abstract
Ämnesord
Stäng
- We have investigated the growth of 3C-SiC using sublimation growth in the temperature range from 1800°C to 1950°C. The supersaturation was determined using numerical modeling of the temperature field and gas phase composition by applying quasi-equilibrium thermodynamic conditions. Analysis of the 3C-SiC yield was carried out by optical microscopy, optical absorption, Raman spectroscopy and x-ray analysis. Quantitative data on supersaturation are compared with most stable 3C-SiC nucleation and growth condition. Finally the application to large area growth in a physical vapor transport growth reactor is briefly addressed.
Ämnesord
- NATURVETENSKAP -- Fysik -- Annan fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Other Physics Topics (hsv//eng)
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