Spatial electron density distribution in a high-power pulsed magnetron discharge

• The spatial electron density distribution was measured as function of time in a high-power pulsed magnetron discharge. A Langmuir probe was positioned in various positions below the target and the electron density was mapped out. We recorded peak electron densities exceeding 1019 m-3 in a close vicinity of the target. The dynamics of the discharge showed a dense plasma expanding from the "race-track" axially into the vacuum chamber. We also record electrons trapped in a magnetic bottle where the magnetron magnetic field is zero, formed due to the unbalanced magnetron.

Nyckelord

magnetron sputtering

plasma density

pulsed plasmas

thin film deposition

NATURAL SCIENCES

NATURVETENSKAP

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)