Stress-induced charge trapping and electrical properties of atomic-layer-deposited HfAlO/Ga2O3 metal-oxide-semiconductor capacitors

• Electrical properties and trapping characteristics of an atomic layer deposited Al-rich HfAlO/beta-Ga2O3 capacitor were evaluated via constant-voltage stress (CVS), capacitance-voltage (C-V), and current-voltage (I-V) measurements. The magnitude of the stress-induced charge trapping increases with increasing voltage and time. The effective charges (N-eff) including the border traps located in near-interface oxide, interface traps (D-it) of HfAlO/beta-Ga2O3 interface, and fixed charges contribute significantly to the observed charge trapping, and it is found that interface traps contribute more under a large stress bias, compared with border traps. In addition, the effective charge density is increased with stress time, implying that the contribution of negative sheet charges during the CVS process might not be negligible. Measurements of oxide permittivity (10.74), interface state density (D-it similar to 1 x 10(12) eV(-1) cm(-2)), and gate leakage current (1.18 x 10( -5) A cm(-2) at +10 V) have been extracted, suggesting the great electrical properties of Al-rich HfAlO/beta-Ga203 MOSCAP. According to the above analysis, Al-rich HfAlO is an attractive candidate for normally off Ga2O3 transistors.

Ämnesord

NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

Nyckelord

gallium oxide; HfAlO/Ga2O3 MOSCAP; constant-voltage stress; oxide traps

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)